Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
with Compound Stage<br />
Ordering Information<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> turbomolecular pump<br />
Electronic frequency converter<br />
<strong>MAG</strong>.DRIVE digital<br />
<strong>MAG</strong>.DRIVE digital<br />
with Profibus interface<br />
Plug-in control<br />
Connecting cable converter – pump 1)<br />
01.5 m (5.25 ft) DRIVE/BEARING<br />
03.0 m (10.5 ft) DRIVE/BEARING<br />
05.0 m (17.5 ft) DRIVE/BEARING<br />
10.0 m (35.0 ft) DRIVE/BEARING<br />
20.0 m (70.0 ft) DRIVE/BEARING<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
W 2200 C W 2200<br />
Part No. 400081V0011 Part No. 400081V0021 Part No. 400081V0061<br />
Part No. 400035V0011 Part No. 400035V0011 Part No. 400035V0011<br />
Part No. 400035V0013 Part No. 400035V0013 Part No. 400035V0013<br />
Part No. 121 36 Part No. 121 36 Part No. 121 36<br />
Part No. 400036V0001 Part No. 400036V0001 Part No. 400036V0001<br />
Part No. 400036V0008 Part No. 400036V0008 Part No. 400036V0008<br />
Part No. 400036V0004 Part No. 400036V0004 Part No. 400036V0004<br />
Part No. 400036V0002 Part No. 400036V0002 Part No. 400036V0002<br />
Part No. 400036V0003 Part No. 400036V0003 Part No. 400036V0003<br />
1) further connecting cables can be found under <strong>MAG</strong>.DRIVE digital in the section “<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension”,<br />
para. “Frequency Converters”<br />
C09 94 Oerlikon Leybold Vacuum Full Line Catalog
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