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ucture ose, Gate discussed 1 <strong>of</strong> very completes low The resistivity metal<br />

the structure.<br />

area material, <strong>of</strong> the gate at forms the gate a capacitor is increased, with the<br />

potential negative (see charge Figure “induced” 5). Positive incharges at the metal side<br />

) depletion is from one region sideto spread insulating The mostly substrate, layers into the and which n-type the functions semiconductor the as Gate semiconductor 2 channel. <strong>of</strong> Figure The 1, increases ismetal<strong>of</strong> until the metal-oxide the region capacitor beneath induce the a corresponding negative<br />

o most which cases an n-type the gates area <strong>of</strong> relatively internally is the top low connected plate; resistivity the material substrate oxide to maximize material effectively gain. and becomes For channel the are an charge n-type at the semiconductor region, side. As the positive charge<br />

tetrode is then device diffusedcan be the same realized bottom purpose, by plate. not Gate making 1 is <strong>of</strong> very and low current resistivity can material, flow between at drain the gate and is source increased, through the the negative charge “induced” in<br />

l ct connection. metallization allowing For the structure depletion region <strong>of</strong> Figure to spread “induced” 4, consider mostly channel. into a the positive n-type In other gatethe words, semiconductor drain current increases flow until is the region beneath the<br />

<br />

potential channel. In<br />

(see most Figure cases 5). the Positive gates are<br />

“enhanced” charges internally<br />

by at connected the gate metal potential. sideoxide effectively becomes an n-type semiconductor region,<br />

Thus drain current flow can<br />

2 <strong>of</strong> Figure 1, is <strong>of</strong> together. the metal-oxide A tetrode capacitor device can induce be realized<br />

be modulated a corresponding by not making<br />

by the gate negativeand current can flow between drain and source through the<br />

voltage; i.e. the channel resistance<br />

this internal connection.<br />

“induced” channel. In other words, drain current flow is<br />

ize gain. For the<br />

<br />

<br />

“enhanced” by the gate potential. Thus drain current flow can<br />

sistivity material, at the gate is increased, the negative may be changed charge “induced” to a p-channel in<br />

be modulated device by by the reversing gate voltage; the i.e. the channel resistance<br />

tly into the n-type the semiconductor <br />

material types.<br />

<br />

<br />

increases until the region beneath theis directly related to the gate voltage. The n-channel structure<br />

rnally connected oxide effectively becomes an n-type semiconductor region, may be changed<br />

<br />

to a p-channel device by reversing the<br />

d by not making and current can flow between drain and source through the<br />

<br />

<br />

material types.<br />

<br />

<br />

<br />

<br />

“induced” channel. In other words, drain current flow is<br />

<br />

<br />

<br />

“enhanced” by the gate potential. Thus drain current flow can<br />

<br />

<br />

<br />

be modulated by the gate voltage; i.e. the channel resistance<br />

<br />

is directly related to the gate voltage. The n-channel structure<br />

<br />

<br />

may be changed to a p-channel device by reversing the<br />

material types. <br />

<br />

<br />

<br />

<br />

<br />

<br />

<br />

D-EFFECT TRANSISTORS (MOSFET)<br />

<br />

<br />

<br />

<br />

MOS FIELD-EFFECT TRANSISTORS (MOSFET)<br />

al-oxide-semiconductor (MOSFET) operates with<br />

<br />

<br />

<br />

<br />

fferent control mechanism The than metal-oxide-semiconductor the JFET. Figure (MOSFET) operates with<br />

<br />

<br />

he development.<br />

<br />

<br />

The a substrate slightly different may be control highmechanism than the JFET. Figure<br />

-type material, as for the 4 2N4351. shows the This development. time two The substrate may be high<br />

<br />

resistivity p-type material, as for the 2N4351. This time two<br />

<br />

w-resistivity n-type regions (source and drain) are<br />

<br />

<br />

the<br />

<br />

separate low-resistivity n-type regions<br />

substrate as shown in Figure 4b. Next, the<br />

Figure (source 3. and Junction drain) are<br />

<br />

FET with Single-Ended Geometry<br />

diffused into the substrate as shown in Figure 4b. Next, the<br />

Figure 3. Junction FET with Single-Ended Geometry<br />

<br />

he structure is covered with an insulating oxide <br />

<br />

a<br />

(MOSFET)<br />

surface <strong>of</strong> the structure is covered with an insulating oxide<br />

nitride layer. The oxide layer serves as a <br />

<br />

bulklayer semiconductor<br />

and a nitride layer.<br />

crystal<br />

The oxide<br />

allows<br />

layer serves<br />

comparatively<br />

as a<br />

<br />

oating for the FET surface and to insulate the<br />

simple manufacture <strong>of</strong> a JFET.<br />

T) operates with protective coating for the FET surface and to insulate the<br />

<br />

<br />

m the gate. However the oxide is subject to<br />

<br />

the JFET. Figure channel from the gate. However the oxide is subject to<br />

<br />

<br />

on e may by sodium be high ions which contamination are found by in sodium varyingions which are found in varying<br />

n all environments. Such quantities contamination all environments. results Such contamination results <br />

<br />

<br />

1. This time two<br />

ce instability and drain) and are changes in in long device term characteristics.<br />

instability and changes in device characteristics.<br />

<br />

<br />

<br />

<br />

ure e is 4b. impervious Next, theto sodium Silicon Figure ions nitride and 3. Junction thus is impervious is used FET to with sodium Single-Ended <br />

ions and thus<br />

Geometry<br />

is used <br />

to shield the oxide layer from contamination. <br />

e insulating oxide layer oxide from contamination. Holes are cut<br />

Holes are cut<br />

<br />

into the oxide and nitride layers allowing metallic contact to<br />

de er and serves nitride as layers a allowing metallic contact to<br />

the source and drain. Then, the gate metal area is overlaid<br />

d and to drain. insulate Then, the the gate on metal the insulation, area is overlaid covering the entire channel region <br />

<br />

and, <br />

de<br />

lation,<br />

is subject<br />

covering<br />

to<br />

the entire simultaneously, channel region metal and, contacts to the drain and <br />

<br />

<br />

source are<br />

<br />

<br />

<br />

found<br />

sly, metal<br />

in varying<br />

contacts to the made drain as shown and source in Figure are4d. The contact to the metal<br />

<br />

area<br />

<br />

own<br />

mination<br />

in Figure<br />

results<br />

4d. The contact covering to the the channel metal area is the gate terminal. Note that there<br />

<br />

<br />

e<br />

channel<br />

characteristics.<br />

is the gate terminal. is no physical Note penetration that there<strong>of</strong> the metal through the oxide and<br />

<br />

<br />

and<br />

al penetration<br />

thus is used<br />

<strong>of</strong> the metal nitride through into the substrate. oxide<br />

<br />

andSince the drain and source are Figure 4. Development <strong>of</strong> Enhancement-Mode<br />

<br />

the substrate. Since the isolated drain by and the source substrate, <br />

areany drain-to-source Figure current 4. Development in the <strong>of</strong> Enhancement-Mode N-Channel MOSFET<br />

n. Holes are cut<br />

<br />

the substrate, any drain-to-source current in the<br />

N-Channel MOSFET<br />

etallic contact to<br />

l area is overlaid<br />

very high intrinsic source-drain resistance.<br />

<br />

nnel region and,<br />

<br />

<br />

and source are<br />

<br />

<br />

o the metal area<br />

Note that there<br />

<br />

<br />

gh the oxide and<br />

and source are establishes a conducting channel between source and drain.<br />

ce current in the<br />

nc...<br />

Freescale Semiconductor, I<br />

charge<br />

8.4.<br />

at the semiconductor side.<br />

FIELD EFFECT TRANSISTOR is directly As the related positive to the charge gate voltage. The n-channel structure<br />

117<br />

Figure 8.16: Fabrication <strong>of</strong> a JFET: doping an annular p-type region into an otherwise n-type<br />

Figure 8.17: Manufacture <strong>of</strong> an enhancement-mode n-channel MOSFET: a) p−doped substrate,<br />

b) n−doped source and drain contacts. The depletion zones around these contacts produces<br />

c) Insulating oxide layer (silicon nitride guards<br />

against sodium diffusing in). d) Metallic contacts to source and drain are made through holes<br />

which are etched into the insulating layer, the metallic gate electrode is insulated from the<br />

substrate. Applying a positive voltage to the gate pulls electrons into the depletion zones and<br />

Figure 4. Development <strong>of</strong> Enhancement-Mode<br />

N-Channel MOSFET<br />

2 For More Information MOTOROLA On This SEMICONDUCTOR Product, APPLICATION INFORMATION<br />

Go to: www.freescale.com<br />

For More Information MOTOROLA On This SEMICONDUCTOR Product, APPLICATION INFORMATION<br />

Go to: www.freescale.com<br />

Pinch-<strong>of</strong>f: At finite drain-source current, the potential in the channel changes along the<br />

channel – it drops from drain to source. This causes the width <strong>of</strong> the depletion zone to change<br />

along the channel. The depletion zone is be widest at the drain end, because there the potential<br />

<strong>of</strong> the n-type channel is highest, and so the voltage between a positively charged gate and the<br />

channel is lowest there. If we increase the drain-source voltage while keeping the gate potential<br />

ore Information MOTOROLA On This SEMICONDUCTOR Product, APPLICATION INFORMATION<br />

Go to: www.freescale.com<br />

constant, then the depletion zone will widen near the drain electrode, until it eventually covers<br />

most <strong>of</strong> the width <strong>of</strong> the semiconductor at that point, pinching <strong>of</strong>f the conducting channel.<br />

Plotting the I − V characteristic, drain-source current I D as a function <strong>of</strong> drain-source voltage<br />

V DS , at constant gate-source voltage V GS (Fig. 8.15) therefore shows saturation <strong>of</strong> I D at high<br />

V DS .<br />

Amplifier: The saturation <strong>of</strong> the drain-source current at a level depending on V GS is the<br />

basis for operating the JFET as an amplifier: we can control the current through the device<br />

by changing the gate voltage, without having to worry about keeping the drain-source voltage<br />

exactly constant. Basically, the JFET acts like a voltage-controlled current source.

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