TPF-C Technology Plan - Exoplanet Exploration Program - NASA
TPF-C Technology Plan - Exoplanet Exploration Program - NASA
TPF-C Technology Plan - Exoplanet Exploration Program - NASA
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Linear 1-sinc 2 masks patterned with controlled optical density profiles have been written in highenergy<br />
electron beam sensitive (HEBS) glass. The HEBS glass darkens to greater opacity with<br />
increased electron beam exposure. Significant progress has been made both in the processes for<br />
fabrication of the glass and electron beam writing as well as in the characterization of the<br />
finished masks. Figure i-2 shows the linear mask and the corresponding image recorded in the<br />
HCIT. Measurement of phase retardation, optical density, optical constants, and polarization<br />
properties are underway or in work. An alternative binary mask design employs electron beam<br />
lithography of aluminum on glass. Development has produced test articles, shown in Figure i-3,<br />
which are currently under test in the HCIT for comparison with the gray scale mask<br />
performance.<br />
Figure i-2. Mask (left) and image (right). The mask is included in the optical train of the<br />
HCIT where the corresponding image is recorded.<br />
Figure i-3. Binary 1-sinc 2 mask (left) produced by electron-beam lithography of aluminium<br />
on glass for f/28.55 and wavelength 785 nm, binary continuous sin 2 mask pattern (middle),<br />
and binary discontinuous sin 2 mask pattern (right).<br />
In 2003 Xinetics produced 32 × 32 mm, 1024-actuator DM modules that demonstrated 0.1-nm<br />
rms surface deformation control on the HCIT. Advances in the connector technology have made<br />
it possible to combine multiple modules behind a single facesheet. Currently, 4096-actuator<br />
DMs built up of four individual modules driving a single 64 × 64-mm facesheet have been<br />
delivered, and 96 × 96-mm DMs are in production. Examples are shown in Figure i-4. Thermal<br />
control, improved calibration, and electronics development have yielded command resolution of<br />