Understanding Smart Sensors - Nomads.usp

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92 Understanding Smart Sensors[11] Baher, H., “Microelectronic Switched Capacitor Filters,” IEEE Circuits and Devices, Jan.1991, pp. 33–36.[12] Dunn, W., and R. Frank, “Automotive Silicon Sensor Integration,” SAE SP-903 Sensorsand Actuators 1992, Detroit, Feb. 24–28, 1992.[13] Winkler, C., and J. Baum, “Barometric Pressure Measurement Using Semiconductor PressureSensors,” Proc. Sensors Expo West, San Jose, CA, Mar. 2–4, 1993, pp. 271–283.[14] Motorola Application Note AN1318, Sensor Device Data/Handbook, DL200/D Rev. 4,1998.[15] Cianci, S., “Airborne Optical Encoders,” EDN Products Edition, Jan. 16, 1995, pp. 9–10.[16] Jacobsen, E., “Inherent Power-Supply-Rejection Scheme Improves Sensor-System Performance,”EDN, Nov. 7, 1996, pp. 161–164.[17] Kandler, M., et al., “Smart CMOS Pressure Sensor,” Proc. 22nd Internat’l Symp. AutomotiveTechnology Automation #90185, Florence, Italy, May 14–18, 1990, pp. 445–449.[18] Iida, M., et al., “Electrical Adjustments for Intelligent Sensor,” SAE 900491, Society ofAutomotive Engineers Internat’l Congress and Exposition, Detroit, Feb. 26–Mar. 2,1990.[19] Senturia, S. D., “Microsensors vs. ICs: A Study in Contrasts,” IEEE Circuits and Devices,Nov. 1990, pp. 20–27.[20] Frank, R., and J. Staller, “The Merging of Micromachining and Microelectronics,” Proc.3rd Internat’l Forum on ASIC and Transducer Technology, Banff, Alberta, Canada, May20–23, 1990, pp. 53–60.[21] Staller, J. S., and W. S. Cumberledge, “An Integrated On-chip Pressure Sensor for AccurateControl Applications,” IEEE Solid-State Sensors and Actuators Workshop, Hilton HeadIsland, SC, 1986.[22] Frank, R., “Two-Chip Approach to Smart Sensors,” Proc. Sensors Expo, Chicago, 1990,pp. 104C1–104C8.[23] Bitko, G., R. Frank, and A. McNeil, “Improvements From Next-Generation MEMs SensorDesign” (to be published).[24] Frank, R., J. Jandu, and M. Shaw, “An Update on Advanced Semiconductor Technologiesfor Integrated Smart Sensors,” Proc. Sensors Expo West, Anaheim, CA, Feb. 8–10, 1994,pp. 249–259.[25] Hoeschele, D. F., Jr., Analog-to-Digital and Digital-to-Analog Conversion Techniques, NewYork: Wiley, 1993.[26] Park, S., “Principles of Sigma-Delta Modulation for Analog-to-Digital Converters,”Motorola APR8/D Rev. 1, 1993.[27] Motorola Application Note AN1100, Sensor Device Data/Handbook, DL200/D Rev. 4,1998.[28] Johnson, R. N., “Signal Conditioning for Digital Systems,” Proc. Sensors Expo, Philadelphia,Oct. 26–28, 1993, pp. 53–62.
5Using MCUs/DSPs to Increase Sensor IQWe could use cow chips instead of microchips and save millions.—Dilbert, by Scott Adams5.1 IntroductionSeveral semiconductor technologies are available to improve the accuracy andthe quality of the measurements and to add diagnostics and other intelligenceto any type of sensor. Foremost among those technologies are MCUs, DSPs,application-specific ICs (ASICs), and field-programmable gate arrays (FPGAs).Dedicated sensor signal processors are usually an adaptation of one of thoseapproaches. The technologies also have the potential to allow for a fully integrated(monolithic) smart sensor. Before taking this next, rather large step, it isimportant to understand the technologies that are available, their contributionto smart sensors, and their ability to provide a higher level of intelligence (andvalue) to sensors.5.1.1 Other IC TechnologiesASIC technology utilizes computer-aided design (CAD) software tools toachieve custom circuit designs. ASIC technology consists of programmablelogic devices (PLDs) for low-circuit density (
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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30 Understanding Smart Sensors2.4.3
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Standards for Smart Sensing 289perf
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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The Implications of Smart Sensor St
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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List of Acronyms and Abbreviations3
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List of Acronyms and Abbreviations
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Glossaryablationvaporization of mat
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Glossary 353buscalibrationconnectio
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Glossary 355end point straight line
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Glossary 357data transmission and p
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Glossary 359multiplexer device that
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Glossary 361repeatability the maxim
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Glossary 363spread spectrum techniq
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Glossary 365transducer a device con
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Selected BibliographyBooks and Jour
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Selected Bibliography 369Northeaste
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Selected Bibliography 371Miscellane
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About the AuthorRandy Frank is a te
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Index4-to 20-mA signal transmitter,
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Index 377definitions, 119-20introdu
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Index 379HVAC, 318-19MCU with integ
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Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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