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Understanding Smart Sensors - Nomads.usp

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224 <strong>Understanding</strong> <strong>Smart</strong> <strong>Sensors</strong>[4] Leonard, M., “Electric Motors on a Chip Advance From Academia’s Labs,” ElectronicDesign, Jan. 25, 1990, p. 26.[5] Allen, M. G., “Polyimide-Based Processes for the Fabrication of Thick ElectroplatedMicrostructures,” 7th Internat’l Conf. on Solid State <strong>Sensors</strong> and Actuators (Transducers ’93),June 7–10, 1993, pp. 60–63.[6] Ahn, C. H., and M. G. Allen, “A Fully Integrated Micromagnetic Actuator With a MultilevelMeander Magnetic Core,” Technical Digest IEEE Solid-State Sensor and ActuatorWorkshop, June 22–25, 1992, Hilton Head, SC, pp. 14–18.[7] Allen, J. J., and H. K. Schriner, “Micromachine Wedge Stepping Motor,” 1998 ASMEInternat’l Mechanical Engineering Congress and Exposition, Nov. 15–20, 1998, Anaheim,CA.[8] Folta, J. A., N. F. Riley, and E. W. Hee, “Design, Fabrication and Testing of a MiniaturePeristaltic Membrane Pump,” Technical Digest IEEE Solid-State Sensor and Actuator Workshop,June 22–25, 1992, Hilton Head, SC, pp. 186–189.[9] Christenson, T. R., et al., “Preliminary Results for a Planar Microdynamometer,” IEEE91CH2817-5 Transducers ‘91, pp. 6–9.[10] “Microtransmission Gives 3 Million-to-One Gear Ratio in a Square Millimeter,” MachineDesign, Feb.19, 1998.[11] Sandia MEMS http://www.mdl.sandia.gov/Micromachine/[12] Hackett, R. H., L. E. Larson, and M. A. Melendes, “The Integration of Micro-MachineFabrication With Electronic Device Fabrication on III-V Semiconductor Materials,” IEEE91CH2817-5 Transducers ‘91, pp. 51–54.[13] Tong, L., M. Mehregany, and L. G. Matus, “Silicon Carbide as a Micromechanics Material,”Technical Digest IEEE Solid-State Sensor and Actuator Workshop, June 22–25, 1992,Hilton Head, SC, pp. 198–201.[14] Markstein, H., “Embedded Micro Heat Pipes Cool Chips,” Electronic Packaging and Production,Oct. 1993, p. 14.[15] Hamilton, R. E., et. al, “Microchannel Cooling of High Power Semiconductor Devices,”U.S. Patent No. 5,801,442, Issued Sept. 1, 1998.[16] http://goesser.mit.edu/MTL/Report94/MEMS/gaseous.html[17] Deimel, P. P., “Micromachining Processes and Structures in Micro-Optics and Optoelectronics,”J. Micromechanics and Microengineering, Dec. 1991, pp. 199–222.[18] Merat, F., and M. Mehregany, “Integrated Micro-Optical-Mechanical Systems,” Proc.SPIE, Vol. 2383, Feb. 1995.[19] Tabib-Azar, M., “Optically Controlled Silicon Microactuators,” Nanotechnology, 1990,pp. 81–92.[20] Kim, C.-J., et al., “Polysilicon Microgripper,” Technical Digest IEEE Solid-State Sensor andActuator Workshop, June 4–7, 1990, Hilton Head, SC, pp. 49–51.

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