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Understanding Smart Sensors - Nomads.usp

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332 <strong>Understanding</strong> <strong>Smart</strong> <strong>Sensors</strong>[21] Harris, R., M. F. Maseeh, and S. D. Senturia, “Automatic Generation of a 3-D Model of aMicrofabricated Structure,” Technical Digest of IEEE Solid-State Sensor and Actuator Workshop,Hilton Head Island, SC, June 4–7, 1990, pp. 36–41.[22] Travis, B., “MEMS <strong>Sensors</strong> and Mechanical Gadgets Enter the Mainstream,” EDN, May21, 1998, pp. 77–87.[23] Gilbert, J. R., and S. F. Bart, “Enabling the Design and Use of MEMS <strong>Sensors</strong>,” <strong>Sensors</strong>,Apr. 1998, pp. 34–37.[24] Goering, R., “Darpa Program Seeds Mixed-Technology CAD,”http://www.eet.com/news/97/938news/seeds.html, Jan. 20, 1997.[25] Najafi, K., “<strong>Smart</strong> Sensor,” J. Micromechanics and Microengineering, June 1991, pp.86–102.[26] Juds, S. M., “Towards a Definition of <strong>Smart</strong> <strong>Sensors</strong>,” <strong>Sensors</strong>, July 1991, pp. 2–3.

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