Understanding Smart Sensors - Nomads.usp

382 Understanding Smart SensorsMicroelectromechanical system (continued)electronic design automation(EDA) tool, 325field emission displays, 219heating elements, 217high-volume, 22intelligent (IMEMS), 201interconnects for stacked wafers, 222microgrippers, 214micromirrors, 215–17micronozzles, 221–22microoptics, 213–14microprobes, 214–15MST product, 312multiuser (MUMPS), 219nanoguitar, 222–23relays, 261RF, 195–96switches, 195technology, 195, 312thermionic emitters, 217–19unfoldable microelements, 219–21Microgrippers, 214electrostatic comb drive technique, 214schematic, 215Micromachined actuators, 203–11microdynamometers, 208–9micromotors, 203–6micropumps, 206microsteam engines, 210microvalves, 203in semiconductor materials, 210–11thermopneumatic, 209Micromachining, 17–44bulk, 17, 19–21chemical etching, 37–40defined, 17–18dry-etching processes, 32–36focused ion beam (FIB), 36IC processes vs., 38integration of, 11–15introduction, 17–19lasers in, 36–37LIGA process, 32materials, 40–44metal structures, 43–44summary, 44surface, 18, 25–31techniques, 31–40technology, 17wafer bonding and, 19, 21–25Micromilling, 36Micromirrors, 215–17defined, 215hinged device, 215–17, 218illustrated, 217, 218Micromotors, 203–6cross windings, 204–5example, 204, 206magnetic, 207rotor, 204wedge stepper, 205, 208Micronozzles, 221–22illustrated, 221nitride structure, 221–22uses, 221Microoptics, 213–14Microoptomechanical system (MOMS), 214Microprobes, 214–15Micropumps, 206Microsteam engines, 210–11gear transmission, 210single-piston, 211Microsystems technology (MST), 201Microvalves, 203Microwave sensors, 185Modems, sensing by, 300Monolithic integration, 8, 9Monolithic microwave ICs (MMICs), 176MOSAIC, 176–77MotorolaCAN (MCAN), 137data link controller (MDLC), 135MPC555 PowerPC MCU, 139Multichannel probe, 262Multichip modules (MCMs), 232–33bare die mounting techniques, 234MCM-C, 233MCM-D, 233MCM-L, 232Multidrop communication, 120, 122Multijunction thermal converters(MJTC), 217, 218fabrication, 217illustrated, 218Multiple sensing devices, 261–64