Understanding Smart Sensors - Nomads.usp

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340 Understanding Smart SensorsIEEEIGEFETIIRIMEMSInPIPIPSIRIRQIS 2ISAISMISOISPFITSIVHSJEDECJISJPLKGDKOHLANLCDInstitute of Electrical and Electronics Engineersinterdigitated gate electrode field-effect transistorinfinite impulse response; filter whose output is determinedby its coefficients, current output, and previousinputs. It is characterized by a nonlinear phase response.intelligent MEMSindium phosphideInternet protocolintegrated pressure sensorinfraredinterrupt request notIntegrated Smart SensorInstrument Society of Americaindustrial, scientific, and medical frequency bands thatwere allocated by the FCC to spur rapid development ofRF applications in a virtual open-market fashion. Licensingis automatic.International Organization for StandardizationInteroperable Systems Project Foundationintelligent transportation systemintelligent vehicle highway system; now ITSJoint Electron Devices Engineering CouncilJoint Industrial Standards. Also Japanese Industrial StandardsCommittee ( JISC)Jet Propulsion Laboratoryknown good die; a specially tested diepotassium hydroxidelocal area networkliquid crystal display
List of Acronyms and Abbreviations 341LDMOSLEDLGALi/TiS 2lidarLIGALNALOSLPCVDLSBLWIMMACManMCANMCMMCNCMCUMDLCMEMSMESFETlateral diffused MOSlight-emitting diodesland grid arraylithium titanium suphurlaser infrared radarprocess developed by the Fraunhofer Institute in Munichthat combines X-ray lithography, electroforming, andmolding to obtain high-aspect ratio micromachined structures.LIGA is derived from the German terms for lithography,electroforming, and molding.low-noise amplifierline of sightlow-pressure chemical vapor depositionleast significant bitlow-power wireless integrated microsensormedia access controlManchesterMotorola CANmultichip module; the interconnection of two or moresemiconductor chips in a semiconductor-type packageMicroelectronics Center of North Carolinamicrocontrol unit or microcontroller unit; a semiconductorthat has a CPU, memory, oscillator, and I/O capabilityon the same chip that is programmed to perform a limitednumber of functionsMotorola’s data link controllermicroelectromechanical systemmetal semiconductor field effect transistor; a highfrequencysemiconductor device produced in GaAs semiconductortechnology
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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10 Understanding Smart SensorsLevel
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12 Understanding Smart Sensorsuser
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14 Understanding Smart Sensorstechn
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16 Understanding Smart Sensorschang
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18 Understanding Smart Sensorstechn
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20 Understanding Smart Sensors Surf
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22 Understanding Smart Sensorssecon
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24 Understanding Smart SensorsSilic
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26 Understanding Smart SensorsSilic
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28 Understanding Smart SensorsSacri
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30 Understanding Smart Sensors2.4.3
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32 Understanding Smart Sensorsmeasu
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34 Understanding Smart SensorsIon+S
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36 Understanding Smart Sensorssidew
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38 Understanding Smart SensorsTable
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40 Understanding Smart Sensorsoptim
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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Getting Sensor Information Into the
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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Communications for Smart Sensors 12
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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Mechatronics and Sensing Systems 25
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Page 315 and 316: Standards for Smart Sensing 293obje
Page 317 and 318: Standards for Smart Sensing 295Mult
Page 319 and 320: 13The Implications of Smart SensorS
Page 321 and 322: The Implications of Smart Sensor St
Page 333 and 334: 14The Next Phase of Sensing Systems
Page 335 and 336: The Next Phase of Sensing Systems 3
Page 355 and 356: List of Acronyms and Abbreviations3
Page 357 and 358: List of Acronyms and Abbreviations
Page 361: List of Acronyms and Abbreviations
Page 373 and 374: Glossaryablationvaporization of mat
Page 375 and 376: Glossary 353buscalibrationconnectio
Page 377 and 378: Glossary 355end point straight line
Page 379 and 380: Glossary 357data transmission and p
Page 381 and 382: Glossary 359multiplexer device that
Page 383 and 384: Glossary 361repeatability the maxim
Page 385 and 386: Glossary 363spread spectrum techniq
Page 387 and 388: Glossary 365transducer a device con
Page 389 and 390: Selected BibliographyBooks and Jour
Page 391 and 392: Selected Bibliography 369Northeaste
Page 393 and 394: Selected Bibliography 371Miscellane
Page 395 and 396: About the AuthorRandy Frank is a te
Page 397 and 398: Index4-to 20-mA signal transmitter,
Page 399 and 400: Index 377definitions, 119-20introdu
Page 401 and 402: Index 379HVAC, 318-19MCU with integ
Page 403 and 404: Index 381Linearization, 108Linear p
Page 405 and 406: Index 383in chemical measurements,
Page 407 and 408: Index 385Ratiometricity, 56Reactive
Page 409 and 410: Index 387IC fabrication, 19micromec
Page 411: Index 389Transducer-independent int
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