Understanding Smart Sensors - Nomads.usp

346 Understanding Smart SensorsSADSAESARSAWSBASCAPSCISCLSCREAMSDLSEMSEMISERCOSSFBSHALSI (units)SiSIASiCSi 3 N 4SiO 2SIOPSIPSLIGAstochastic analog-to-digitalSociety of Automotive Engineerssuccessive approximation registersurface acoustical wavesolder bump arraysilicon capacitive absolute pressureserial communications interfaceserial clock linesingle-crystal reactive etching and metallization; amicromachining process that uses reactive ion etchingserial data linescanning electron microscopeSemiconductor Equipment Materials Internationalserial, real-time communication systemsilicon fusion bondingSmart House Applications LanguageInternational System of Units established in 1960 by the11th General Conference on Weights and Measures andbased on the metric systemsiliconSemiconductor Industry Associationsilicon carbide; a high-temperature semiconductor, sensor,and MEMS materialsilicon nitridesilicon dioxideserial I/O portsingle in-line plasticLIGA process with the addition of a sacrificial layer