Understanding Smart Sensors - Nomads.usp

More documents

Recommendations

Info

332 Understanding Smart Sensors[21] Harris, R., M. F. Maseeh, and S. D. Senturia, “Automatic Generation of a 3-D Model of aMicrofabricated Structure,” Technical Digest of IEEE Solid-State Sensor and Actuator Workshop,Hilton Head Island, SC, June 4–7, 1990, pp. 36–41.[22] Travis, B., “MEMS Sensors and Mechanical Gadgets Enter the Mainstream,” EDN, May21, 1998, pp. 77–87.[23] Gilbert, J. R., and S. F. Bart, “Enabling the Design and Use of MEMS Sensors,” Sensors,Apr. 1998, pp. 34–37.[24] Goering, R., “Darpa Program Seeds Mixed-Technology CAD,”http://www.eet.com/news/97/938news/seeds.html, Jan. 20, 1997.[25] Najafi, K., “Smart Sensor,” J. Micromechanics and Microengineering, June 1991, pp.86–102.[26] Juds, S. M., “Towards a Definition of Smart Sensors,” Sensors, July 1991, pp. 2–3.
List of Acronyms and Abbreviations3C-SiCA/DA/FA-busACKADCADPCMADSAFMAHDLAlALUAMRAANSIAPIepitaxial silicon carbideanalog to digitalair-fuel ratioAutomotive Bit-Serial Universal Interface SystemacknowledgeA/D converteradaptive differential pulse code modulationautomatic driver sensoratomic force microscopeanalog hardware description languagealuminumarithmetic logic unit; the unit of a computing system containingcircuits that perform arithmetic and logicaloperationsAutomatic Meter Reading AssociationAmerican National Standards Instituteapplication programming interface333
Page 2 and 3:
Understanding Smart SensorsSecond E
Page 5:
Library of Congress Cataloging-in-P
Page 8 and 9:
ContentsPrefacexix1 Smart Sensor Ba
Page 10 and 11:
Contentsix3.3.3 Hall Effect 603.3.4
Page 12 and 13:
Contentsxi5.8 Summary 116References
Page 14 and 15:
Contentsxiii8.3.1 Surface Acoustica
Page 16 and 17:
Contentsxv11.1.1 Integration and Me
Page 18 and 19:
Contentsxvii14.4.4 Electrostatic Me
Page 20 and 21:
PrefaceThe number one challenge fac
Page 22 and 23:
Prefacexxifor well over 6 years. A
Page 24 and 25:
2 Understanding Smart Sensorsobserv
Page 26 and 27:
4 Understanding Smart Sensorssmart
Page 28 and 29:
6 Understanding Smart Sensorsto pro
Page 30 and 31:
8 Understanding Smart Sensorsinclud
Page 32 and 33:
10 Understanding Smart SensorsLevel
Page 34 and 35:
12 Understanding Smart Sensorsuser
Page 36 and 37:
14 Understanding Smart Sensorstechn
Page 38 and 39:
16 Understanding Smart Sensorschang
Page 40 and 41:
18 Understanding Smart Sensorstechn
Page 42 and 43:
20 Understanding Smart Sensors Surf
Page 44 and 45:
22 Understanding Smart Sensorssecon
Page 46 and 47:
24 Understanding Smart SensorsSilic
Page 48 and 49:
26 Understanding Smart SensorsSilic
Page 50 and 51:
28 Understanding Smart SensorsSacri
Page 52 and 53:
30 Understanding Smart Sensors2.4.3
Page 54 and 55:
32 Understanding Smart Sensorsmeasu
Page 56 and 57:
34 Understanding Smart SensorsIon+S
Page 58 and 59:
36 Understanding Smart Sensorssidew
Page 60 and 61:
38 Understanding Smart SensorsTable
Page 62 and 63:
40 Understanding Smart Sensorsoptim
Page 64 and 65:
42 Understanding Smart SensorsAlumi
Page 66 and 67:
44 Understanding Smart SensorsThe f
Page 68 and 69:
46 Understanding Smart Sensors[21]
Page 70:
This Page Intentionally Left Blank
Page 73 and 74:
The Nature of Semiconductor Sensor
Page 75 and 76:
Page 77 and 78:
Page 79 and 80:
Page 81 and 82:
Page 83 and 84:
Page 85 and 86:
Page 87 and 88:
Page 89 and 90:
Page 91 and 92:
Page 93 and 94:
4Getting Sensor Information Into th
Page 95 and 96:
Getting Sensor Information Into the
Page 97 and 98:
Page 99 and 100:
Page 101 and 102:
Page 103 and 104:
Page 105 and 106:
Page 107 and 108:
Page 109 and 110:
Page 111 and 112:
Page 113 and 114:
Page 115 and 116:
5Using MCUs/DSPs to Increase Sensor
Page 117 and 118:
Using MCUs/DSPs to Increase Sensor
Page 119 and 120:
Page 121 and 122:
Page 123 and 124:
Page 125 and 126:
Page 127 and 128:
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Page 135 and 136:
Page 137 and 138:
Page 139 and 140:
Page 141 and 142:
6Communications for Smart SensorsBe
Page 143 and 144:
Communications for Smart Sensors 12
Page 145 and 146:
Page 147 and 148:
Page 149 and 150:
Page 151 and 152:
Page 153 and 154:
Page 155 and 156:
Page 157 and 158:
Page 159 and 160:
Page 161 and 162:
Page 163 and 164:
Page 165 and 166:
Page 167 and 168:
Page 169 and 170:
Page 171 and 172:
7Control TechniquesA machine is int
Page 173 and 174:
Control Techniques 151Table 7.1Type
Page 175 and 176:
Control Techniques 153otherwise tak
Page 177 and 178:
Control Techniques 155consisting of
Page 179 and 180:
Control Techniques 157Supplied byap
Page 181 and 182:
Control Techniques 159InputX1Synaps
Page 183 and 184:
Control Techniques 1617.6 Adaptive
Page 185 and 186:
Control Techniques 163ObserverHB−
Page 187 and 188:
Control Techniques 165linear-vector
Page 189 and 190:
Control Techniques 1677.7.2 Combine
Page 191 and 192:
Control Techniques 169Domain-type s
Page 193 and 194:
Control Techniques 171[19] De Silva
Page 195 and 196:
8Transceivers, Transponders, andTel
Page 197 and 198:
Transceivers, Transponders, and Tel
Page 199 and 200:
Page 201 and 202:
Page 203 and 204:
Page 205 and 206:
Page 207 and 208:
Page 209 and 210:
Page 211 and 212:
Page 213 and 214:
Page 215 and 216:
Page 217 and 218:
Page 219 and 220:
Page 221 and 222:
Page 223 and 224:
9MEMS Beyond Sensors“And these ot
Page 225 and 226:
MEMS Beyond Sensors 203would not ex
Page 227 and 228:
MEMS Beyond Sensors 205PyrexSilicon
Page 229 and 230:
MEMS Beyond Sensors 207(a)IFluxIIMa
Page 231 and 232:
MEMS Beyond Sensors 209InletThermop
Page 233 and 234:
MEMS Beyond Sensors 211Figure 9.8 A
Page 235 and 236:
MEMS Beyond Sensors 2139.3.2 Microo
Page 237 and 238:
MEMS Beyond Sensors 215Over-range p
Page 239 and 240:
MEMS Beyond Sensors 217+ 10°− 10
Page 241 and 242:
MEMS Beyond Sensors 219achieved wit
Page 243 and 244:
MEMS Beyond Sensors 221Methods for
Page 245 and 246:
MEMS Beyond Sensors 223Figure 9.19
Page 247 and 248:
MEMS Beyond Sensors 225[21] Tortone
Page 249 and 250:
10Packaging, Testing, and Reliabili
Page 251 and 252:
Packaging, Testing, and Reliability
Page 253 and 254:
Page 255 and 256:
Page 257 and 258:
Page 259 and 260:
Page 261 and 262:
Page 263 and 264:
Page 265 and 266:
Page 267 and 268:
Page 269 and 270:
Page 271 and 272:
11Mechatronics and Sensing SystemsP
Page 273 and 274:
Mechatronics and Sensing Systems 25
Page 275 and 276:
Page 277 and 278:
Page 279 and 280:
Page 281 and 282:
Page 283 and 284:
Page 285 and 286:
Page 287 and 288:
Page 289 and 290:
Page 291 and 292:
Page 293 and 294:
Page 295 and 296:
12Standards for Smart SensingThe la
Page 297 and 298:
Standards for Smart Sensing 275Netw
Page 299 and 300:
Standards for Smart Sensing 277NCAP
Page 301 and 302:
Standards for Smart Sensing 279Proc
Page 303 and 304: Standards for Smart Sensing 281PID
Page 305 and 306: Standards for Smart Sensing 283•
Page 307 and 308: Standards for Smart Sensing 285•
Page 309 and 310: Standards for Smart Sensing 287Tabl
Page 311 and 312: Standards for Smart Sensing 289perf
Page 313 and 314: Standards for Smart Sensing 2911 0
Page 315 and 316: Standards for Smart Sensing 293obje
Page 317 and 318: Standards for Smart Sensing 295Mult
Page 319 and 320: 13The Implications of Smart SensorS
Page 321 and 322: The Implications of Smart Sensor St
Page 333 and 334: 14The Next Phase of Sensing Systems
Page 335 and 336: The Next Phase of Sensing Systems 3
Page 353: The Next Phase of Sensing Systems 3
Page 357 and 358: List of Acronyms and Abbreviations
Page 373 and 374: Glossaryablationvaporization of mat
Page 375 and 376: Glossary 353buscalibrationconnectio
Page 377 and 378: Glossary 355end point straight line
Page 379 and 380: Glossary 357data transmission and p
Page 381 and 382: Glossary 359multiplexer device that
Page 383 and 384: Glossary 361repeatability the maxim
Page 385 and 386: Glossary 363spread spectrum techniq
Page 387 and 388: Glossary 365transducer a device con
Page 389 and 390: Selected BibliographyBooks and Jour
Page 391 and 392: Selected Bibliography 369Northeaste
Page 393 and 394: Selected Bibliography 371Miscellane
Page 395 and 396: About the AuthorRandy Frank is a te
Page 397 and 398: Index4-to 20-mA signal transmitter,
Page 399 and 400: Index 377definitions, 119-20introdu
Page 401 and 402: Index 379HVAC, 318-19MCU with integ
Page 403 and 404: Index 381Linearization, 108Linear p
Page 405 and 406:
Index 383in chemical measurements,
Page 407 and 408:
Index 385Ratiometricity, 56Reactive
Page 409 and 410:
Index 387IC fabrication, 19micromec
Page 411:
Index 389Transducer-independent int
show all

Understanding Smart Sensors - Nomads.usp

Create successful ePaper yourself

Delete template?

Save as template?