Understanding Smart Sensors - Nomads.usp

378 Understanding Smart SensorsDigital-to-analog converters(DACs), 88, 110Distributed control systems (DCS), 149Distributed systems interface (DSI), 306–8automotive airbag system using, 308defined, 306–7example, 307two-wire network, 307Dry etching, 32–36ion-beam milling, 34plasma, 32–34RIE, 34–35SCREAM, 35–36See also EtchingDual-chip packaging, 233–34Dual in-line plastic (DIP) package, 228Dynamic time warping, 164–65Electrically erasable programmable read onlymemory (EEPROM), 14, 97–98erase voltages, 98locations, 98Electrical oscillator-based (EOB) sensors, 65Electrochemical fabrication (EFAB), 43–44defined, 43process illustration, 43Electromagnetic interference(EMI), 111, 267automotive testing example, 269in process control system, 268Electrostatic discharge (ESD), 265, 267as application requirement, 267testing, 268Electrostatic mesocooler, 320–21Embedded sensing, 252–61current, 256diagnostics, 256–61MEMS relays, 261temperature, 252–56End-point method, 55–56Erasable programmable ROM(EPROM), 94, 97–98Etchingchemical, 37–40dry, 32–36ion-beam milling, 34isotropic, 19plasma, 32–34rates, 19, 20RIE, 34–35SCREAM, 35–36stop techniques, 20wet, 31Ethernet, 300Profibus interface and, 142sensor retrofitting and, 300Evaluation module (EVM), 112Fabry-Perot interferometers (FPIs), 317–18Failurekey mechanism, 242physics of, 242–43See also ReliabilityFailure-mode-and-effect analysis(FMEA), 250Fast Fourier transforms (FFTs), 106Fault diagnostics, 258, 260Fax/modems, 180–81Ferroelectric effect, 98Fieldbus protocol, 130, 132control system architecture, 131defined, 130See also Industrial protocolsField-effect transistor (FET), 61Field emission displays (FEDs), 219, 266–67Field-programmable analog arrays(FPAAs), 94Field-programmable gate arrays(FPGAs), 93, 94Films3C-SiC, 210–11polymer, 42–43Flicker noise, 66Flip-chip packaging, 237–38illustrated, 239in sensors, 237technology, 237, 238See also PackagingFocused ion beam (FIB) micromachining, 36Frequency-division multiple access(FDMA), 179Frequency shift keying (FSK), 179Full-scale value (F.S.), 56Future sensing systemselectrostatic mesocooler, 320–21Fabry-Perot interferometer, 317–18