Nanotechnology-Enabled Sensors

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142 Chapter 4: Nano Fabrication and Patterning Techniques Fig. 4.3 Modes of thin film growth. Fig. 4.4 The typical thin film growth mechanism.
4.3 Formation of Thin Films 143 There are numerous thin film deposition techniques available which are categorized as either vapour phase deposition or liquid phase deposition. The deposition technique determines whether the film is conformal or non-conformal, with respect to the underlying substrate’s surface morphology. A conformal coating covers all surfaces to a uniform depth, following (conforming to) the substrate’s shape. A non-conformal coating is non-uniform and does not conform to the substrate’s surface (Fig. 4.5). conformal non-conformal Fig. 4.5 Conformal and non-conformal coatings. This section is an introduction of how nano-structured thin films can be formed. In the following sections, we will describe different vapor and liquid phase deposition techniques that are commonly utilized in both the nanotechnology and sensor technology fields. 4.3.2 Growth of One-Dimensional Nano-structured Thin Films Thin films made from one-dimensional nanostructures are useful for the fabrication of both gas and liquid phase sensors. Their surface-to-volume ratio is large and they can be deposited using either standard or low cost microfabrication techniques. Nanobelts, nanorods, nanotubes and nanofibers are all examples of one-dimensional nanostructures. They can be deposited spontaneously without the help of any templates using the following techniques: 28 (a) evaporation-condensation and vapour-liquid-solid (VLS) growth in the gas phase (b) dissolution-condensation and solutionliquid-solid (SLS) growth in the liquid phase. Spontaneous growth on a surface can be realized through reduction of the Gibbs free energy associated with the surface. Phase transformation, stress changes, and chemical reactions can all be used to control the Gibbs free energy.
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Nanotechnology-Enabled Sensors
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Kourosh Kalantar-zadeh RMIT Univers
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Acknowledgments We have been fortun
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viii Contents Chapter 3: Transducti
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x Contents 5.7.1 Scanning Electron
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xii Contents 7.5 Nano-sensors based
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2 Chapter 1: Introduction Nobel lau
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4 Chapter 1: Introduction Fig. 1.2
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6 Chapter 1: Introduction ensure th
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8 Chapter 1: Introduction ments, th
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10 Chapter 1: Introduction aim is t
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12 Chapter 1: Introduction Referenc
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14 Chapter 2: Sensor Characteristic
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64 Chapter 3: Transduction Platform
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192 Chapter 4: Nano Fabrication and
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212 Chapter 5: Characterization Tec
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Chapter 6: Inorganic Nanotechnology
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6.2 Density and Number of States 28
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2 6.2 Density and Number of States
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6.3 Gas Sensing with Nanostructured
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6.3.7 Surface Modification 6.3 Gas
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This is the dispersion relation for
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6.4 Phonons in Low Dimensional Stru
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335 vibrational degrees of freedom
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337 ing ballistic transport of elec
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339 Fig. 6.36 Nanoresonators made o
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6.5 Nanotechnology Enabled Mechanic
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6.6 Nanotechnology Enabled Optical
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6.7 Magnetically Engineered Spintro
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ferromagnetic haematite (a form of
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References 365 21 E. Comini, G. Fag
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References 367 58 D. E. Williams an
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References 369 96 J. J. Shi, Y. F.
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Chapter 7: Organic Nanotechnology E
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7.2 Surface Interactions 373 can be
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7.2 Surface Interactions 375 Carbox
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7.2 Surface Interactions 377 Fig. 7
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7.2 Surface Interactions 379 There
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Fig. 7.12 The schematic of physical
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Fig. 7.13 Formation of SAMs. 7.2 Su
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7.2 Surface Interactions 385 ple, t
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7.3 Surface Materials and Surface M
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7.4 Proteins in Nanotechnology Enab
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7.4.4 Using Proteins as Nanodevices
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Fig. 7.36 The general structure of
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+ 7.4 Proteins in Nanotechnology En
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7.5 Nano-sensors based on Nucleotid
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Fig. 7.57 The structure of DNA stra
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7.6 Sensors Based on Molecules with
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7.6 Sensors Based on Molecules with
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7.8 Biomagnetic Sensors 7.8 Biomagn
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7.9 Summary 471 metal oxides, carbo
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References 473 19 T. Kunitake, Ange
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63 J. X. Huang, S. Virji, B. H. Wei
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References 477 105 M. Plomer, G. G.
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References 479 145 R. F. Service, S
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7.8 References 481 185 J. Wang, D.
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Remote plasma enhanced CVD (RPECVD)
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Thin film equivalent circuit ... 32
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Optical waveguides ................
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Semiconductor-semiconductor junctio
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About the Authors Dr. Kourosh Kalan
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