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Nanotechnology-Enabled Sensors

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4.9 Nanolithography and Nano-Patterning 193<br />

Fig. 4.46 SEM images of (a) cicada wing’s surface and (b) replicated in PDMS.<br />

4.9.4 Patterning with Energetic Particles<br />

Energetic particles such as electrons, ions, and electrically neutral metastable<br />

atoms may be used to form patterns with nanometer resolution in

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