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Nanotechnology-Enabled Sensors

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6.3 Gas Sensing with Nanostructured Thin Films 329<br />

Fig. 6.31 Stages of structure transformation of In2O3 films during thermal treatment.<br />

Reprinted with permission from the Elsevier publications. 66<br />

Fig. 6.32 Influence of annealing on AFM images of In2O3 films: (a) 500°C, (b)<br />

600°C, (c) 800°C, (d) 900°C, (e) 1000°C and (f) 1100°C. Reprinted with permission<br />

from the Elsevier publications. 66<br />

6.4 Phonons in Low Dimensional Structures<br />

A phonon is a quantized mode of vibration occurring in a rigid crystal<br />

lattice. Phonons can scatter electrons and interact with photons. They play<br />

an important role in the electrical and thermal conductivity of micro/nano<br />

devices. Similar to electrons, phonons can be confined within the low

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