Nanotechnology-Enabled Sensors

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200 Chapter 4: Nano Fabrication and Patterning Techniques 4.9.6 Interference Lithography An unconventional type of lithography is called interference lithography or laser focusing lithography. 94,95 In this technique, light waves, which are generated using different laser sources, interfere with each other to produce standing waves. These standing waves create high and low intensity regions on the surface of the substrate, that has been coated with a layer of photoresist. These standing waves act similar to of a photolithographic mask to produce bright and dark spots (Fig. 4.52). Fig. 4.52 The principle of the interference lithography. Examples of patterns produced onto a commercially available photoresist are shown in Fig. 4.53 and Fig. 4.54.
4.9 Nanolithography and Nano-Patterning 201 Fig. 4.53 Planar view of gratings produced by interference lithography. Fig. 4.54 Planar view of a doubly exposed interference pattern (second exposure after 90° rotation).
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Nanotechnology-Enabled Sensors
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Kourosh Kalantar-zadeh RMIT Univers
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Acknowledgments We have been fortun
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viii Contents Chapter 3: Transducti
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x Contents 5.7.1 Scanning Electron
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xii Contents 7.5 Nano-sensors based
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2 Chapter 1: Introduction Nobel lau
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4 Chapter 1: Introduction Fig. 1.2
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6 Chapter 1: Introduction ensure th
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8 Chapter 1: Introduction ments, th
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10 Chapter 1: Introduction aim is t
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12 Chapter 1: Introduction Referenc
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14 Chapter 2: Sensor Characteristic
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64 Chapter 3: Transduction Platform
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100 Chapter 3: Transduction Platfor
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136 Chapter 4: Nano Fabrication and
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Page 162 and 163: 150 Chapter 4: Nano Fabrication and
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250 Chapter 5: Characterization Tec
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Chapter 6: Inorganic Nanotechnology
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6.2 Density and Number of States 28
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2 6.2 Density and Number of States
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6.3 Gas Sensing with Nanostructured
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6.3.7 Surface Modification 6.3 Gas
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This is the dispersion relation for
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6.4 Phonons in Low Dimensional Stru
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335 vibrational degrees of freedom
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337 ing ballistic transport of elec
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339 Fig. 6.36 Nanoresonators made o
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6.5 Nanotechnology Enabled Mechanic
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6.6 Nanotechnology Enabled Optical
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6.7 Magnetically Engineered Spintro
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ferromagnetic haematite (a form of
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References 365 21 E. Comini, G. Fag
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References 367 58 D. E. Williams an
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References 369 96 J. J. Shi, Y. F.
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Chapter 7: Organic Nanotechnology E
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7.2 Surface Interactions 373 can be
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7.2 Surface Interactions 375 Carbox
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7.2 Surface Interactions 377 Fig. 7
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7.2 Surface Interactions 379 There
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Fig. 7.12 The schematic of physical
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Fig. 7.13 Formation of SAMs. 7.2 Su
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7.2 Surface Interactions 385 ple, t
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7.3 Surface Materials and Surface M
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7.4 Proteins in Nanotechnology Enab
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7.4.4 Using Proteins as Nanodevices
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Fig. 7.36 The general structure of
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+ 7.4 Proteins in Nanotechnology En
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7.5 Nano-sensors based on Nucleotid
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Fig. 7.57 The structure of DNA stra
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7.6 Sensors Based on Molecules with
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7.6 Sensors Based on Molecules with
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7.8 Biomagnetic Sensors 7.8 Biomagn
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7.9 Summary 471 metal oxides, carbo
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References 473 19 T. Kunitake, Ange
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63 J. X. Huang, S. Virji, B. H. Wei
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References 477 105 M. Plomer, G. G.
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References 479 145 R. F. Service, S
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7.8 References 481 185 J. Wang, D.
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Remote plasma enhanced CVD (RPECVD)
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Thin film equivalent circuit ... 32
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Optical waveguides ................
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Semiconductor-semiconductor junctio
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About the Authors Dr. Kourosh Kalan
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Nanotechnology-Enabled Sensors

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