CHEMICAL VAPOR DEPOSITION OF THIN FILM MATERIALS FOR ...
CHEMICAL VAPOR DEPOSITION OF THIN FILM MATERIALS FOR ...
CHEMICAL VAPOR DEPOSITION OF THIN FILM MATERIALS FOR ...
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CONTENTS<br />
ABSTRACT .................................................................................................................................... ii<br />
DEDICATION ............................................................................................................................... iv<br />
LIST <strong>OF</strong> ABBREVIATIONS AND SYMBOLS ........................................................................... v<br />
ACKNOWLEDGMENTS ........................................................................................................... viii<br />
LIST <strong>OF</strong> TABLES ....................................................................................................................... xiv<br />
LIST <strong>OF</strong> FIGURES ...................................................................................................................... xv<br />
CHAPTER 1. INTRODUCTION ................................................................................................... 1<br />
1.1 Chemical Vapor Deposition (CVD) ...................................................................................... 2<br />
1.1.1 Introduction .................................................................................................................... 2<br />
1.1.2 Atomic Layer Deposition (ALD) ................................................................................... 6<br />
1.1.3 Direct Liquid Injection Chemical Vapor Deposition (DLICVD) ................................... 8<br />
1.2 Thin Film Growth and Characterization ............................................................................. 10<br />
1.2.1 Gas Kinetics .................................................................................................................. 10<br />
1.2.2 Thin film growth in a CVD process ............................................................................. 12<br />
1.2.3 Thin Film Characterization ........................................................................................... 17<br />
1.2.3.1 Attenuated Total Reflectance Fourier Transform Infrared Spectroscopy (ATR-<br />
FTIR) ................................................................................................................................. 18<br />
1.2.3.2 X-ray Photoelectron Spectroscopy (XPS) ............................................................. 21<br />
x