CHEMICAL VAPOR DEPOSITION OF THIN FILM MATERIALS FOR ...

negative slope) behavior in the pumping mode Fig.25 (b). Noteworthy, in the adsorption mode,
the curve doesn't saturate even after 6 min, which should be explained by the multilayer
physisorption behavior. Adsorption at 150˚C shows even sharper increase of C-H stretching
signal. As seen in Fig.24, the strong decomposition signals observed at 150˚C indicated presence
of great amounts of decomposition products, which also include certain alkyl groups. Therefore,
the sharp increasing behavior should be contributed to the accumulation of both intact TDMAH
and thermal decomposition products. As one can see for the desorption profile of 150˚C
experiment, its desorption rate is much slower than that at 100˚C. This might be because of the
Fig. 25. Integrated C-H stretching area change with TDMAH (a) adsorption and (b) desorption time at different
substrate temperatures.
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