Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ...
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<strong>Si</strong>-np and their agglomeration. For this purpose, a ML composed of 50 patterns of 3<br />
nm SRSO-P15 and 3 nm-<strong>Si</strong>O 2 was grown. All the MLs in the following discussions<br />
will be represented as 'Pattern number (t SRSOnm /t <strong>Si</strong>O2 nm)'. Prior to the study on<br />
emission behaviours, the structure of our 50(3/3) ML is investigated to ensure the<br />
sublayer thicknesses are as expected to form <strong>Si</strong>-np. Most of the studies unless specied<br />
otherwise are done on the as-grown samples and the samples annealed at two<br />
chosen annealing treatments : 1min-1000°C and 1h-1100°C. These two annealing<br />
treatments are interesting since we assume that:<br />
ˆ a Short Time Annealing (STA) at 1min-1000°C allows the completion of <strong>Si</strong><br />
seeds which grow with further annealing treatments and crystallize.<br />
tel-00916300, version 1 - 10 Dec 2013<br />
ˆ the Classical Annealing (CA) at 1h-1100°C almost completes the formation of<br />
<strong>Si</strong>-np.<br />
The intermediate annealing temperatures are analyzed if there is a need.<br />
3.7.1 Structural analysis<br />
(a) Fourier transform infrared spectroscopy and X-Ray Diraction<br />
The Brewster inci<strong>de</strong>nce FTIR and the XRD spectra of the test sample 50(3/3) are<br />
shown in gures 3.17a and 3.17b respectively.<br />
(a) FTIR spectra.<br />
(b) XRD Spectra.<br />
Figure 3.17: Structural changes in 50(3/3) ML with annealing as investigated by (a)<br />
Brewster inci<strong>de</strong>nce FTIR spectra and (b) XRD spectra.<br />
It can be seen from the FTIR spectra that the LO 3 and TO 3 peaks shift towards<br />
higher wavenumber. The intensity of the LO 4 -TO 4 peak <strong>de</strong>creases indicating<br />
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