Asymmetric fluid-structure dynamics in nanoscale imprint lithography

Connected toFlexure RingConnected toBase StructureUPRFigure 3.5 Actuation legA distributed flexure ring, shown in Figure 3.6, is used to provide theappropriate kinematic constraints for the linear actuators. The distributed flexurering allows the high-resolution actuators to bring the template and wafer surfacesinto parallel alignment and squeeze the etch barrier down to an optimal base layerthickness while minimizing lateral motion between the template and wafer. Theactuators generate pushing/pulling motions on the distributed flexure ring toprovide a three-point position control of the template orientation as shownschematically in Figure 3.7. Actuation force needs to be large enough togenerate 15 psi when the flexure ring is fully deflected in one direction.Fixed toBaseStructureFigure 3.6 Distributed flexure ring47