Asymmetric fluid-structure dynamics in nanoscale imprint lithography
Asymmetric fluid-structure dynamics in nanoscale imprint lithography
Asymmetric fluid-structure dynamics in nanoscale imprint lithography
- No tags were found...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
10090807060PSD504030201000 500 1000 1500 2000 2500 3000 3500 4000simulated film thickness, nmFigure 4.4 PSD of theoretical reflectivity signal with a 500 nm thickness.In Figure 4.4, the <strong>in</strong>dex of refraction was taken as 1.5; 2 7 po<strong>in</strong>ts were used fromthe signal and 2 14 72–po<strong>in</strong>t FFT, i.e. Mag = .14258