Bewilligungen im Jahr 2008 - Volkswagen Stiftung
Bewilligungen im Jahr 2008 - Volkswagen Stiftung
Bewilligungen im Jahr 2008 - Volkswagen Stiftung
Sie wollen auch ein ePaper? Erhöhen Sie die Reichweite Ihrer Titel.
YUMPU macht aus Druck-PDFs automatisch weboptimierte ePaper, die Google liebt.
Braunschweig<br />
Aachen<br />
Uppsala<br />
- 140 -<br />
Serial co-sputtering for functional multi component thin films – COSMOS (extension)<br />
Bewilligung: 09.02.2011 Laufzeit: 2 <strong>Jahr</strong>e<br />
Serial co-sputtering involves several potential benefits compared to conventional<br />
magnetron sputtering, namely the enhancement of the deposition rate per power by codoping<br />
with heavy elements, the possibility of a precise rate control by monitoring the<br />
material coverage of the rotating target, as well as the possibility of fabricating material<br />
compositions that are difficult to provide as conventional alloy target. Further, by<br />
modification of the pr<strong>im</strong>ary target surface composition, process conditions such as target<br />
voltage and ion fluxes can be tailored. For these reasons, the project 'Cosmos - Serial<br />
co-sputtering for functional multicomponent thin films' has been initiated in which several<br />
of the benefits of serial co-sputtering mentioned could be validated. This follow up project<br />
a<strong>im</strong>s now to systematically exploit the whole potential of this technology. This involves<br />
opt<strong>im</strong>ization of the rate enhancement and precision of rate control for technologically<br />
relevant materials such as TiO2. But specifically, the full potential of the new technology<br />
should now be demonstrated by development of advanced multi-component materials.<br />
Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig<br />
Gruppe S<strong>im</strong>ulation<br />
Dr. Andreas Pflug<br />
Rheinisch-Westfälische Technische Hochschule Aachen<br />
I. Physikalisches Institut (IA)<br />
Lehrstuhl für Physik neuer Materialien<br />
Prof. Dr. Matthias Wuttig<br />
Uppsala University<br />
Ångström Laboratory<br />
Solid State Electronics<br />
Dr. Tomas Kubart<br />
SCHWEDEN<br />
Ansprechpartner:<br />
Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST)<br />
Gruppe S<strong>im</strong>ulation<br />
Dr. Andreas Pflug<br />
Bienroder Weg 54e<br />
38108 Braunschweig<br />
Tel.: 0531 2155 629<br />
Fax: 0531 2155 900<br />
____________
Change language