PCT/2001/45 - World Intellectual Property Organization

45/2001
8 Nov/nov 2001 PCT Gazette - Section I - Gazette du PCT 20339
LAMPE A INCANDESCENCE A BASSE
TENSION A DOUBLE ENVELOPPE
(71) ILLUMINATION TECHNOLOGY, INC.
[US/US]; 5440 Cerritos Avenue, Cypress, CA
90630-4600 (US).
(72) HARTLEY, John, B.; 1334 Goucher
Street, Pacific Palisades, CA 90272 (US).
THEEGALA, Muralidhar; 14532 Village
View Lane, Chino Hills, CA 91709 (US).
ANGHELUS, Alexandrina; 5598 Cajon
Avenue, Buena Park, CA 90621 (US).
(74) KLEIN, Howard, J. et al. / etc.; Klein &
Szekeres, LLP, 4199 Campus Drive, Suite
700, Irvine, CA 92612 (US).
(81) AE AG AL AM AT AT (Utility model /
modèle d’utilité) AUAZBABBBGBRBY
BZ CA CH CN CO CR CU CZ CZ (Utility
model / modèle d’utilité) DE DE (Utility
model / modèle d’utilité) DK DK (Utility
model / modèle d’utilité) DM DZ EE EE
(Utility model / modèle d’utilité) ESFIFI
(Utility model / modèle d’utilité)GBGDGE
GH GM HR HU ID IL IN IS JP KE KG KP
KR KZ LC LK LR LS LT LU LV MA MD
MG MK MN MW MX MZ NO NZ PL PT
RO RU SD SE SG SI SK SK (Utility model
/ modèle d’utilité) SLTJTMTRTTTZUA
UG UZ VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
Published / Publiée :(c)
(51) 7 H01L 21/00
(11) WO 01/84598
(21) PCT/EP01/04692
(13) A1
(22) 26 Apr/avr 2001 (26.04.2001)
(25) de (26) de
(30) 100 21 329.4 2 May/mai 2000
(02.05.2000)
DE
(43) 8 Nov/nov 2001 (08.11.2001)
(54) METHOD AND DEVICE FOR TREAT-
ING SLICE-TYPE SUBSTRATES
PROCEDE ET DISPOSITIF POUR LE
TRAITEMENT DE SUBSTRATS DE
TYPE TRANCHES
(71) MATTSON WET PRODUCTS GMBH
[DE/DE]; Carl-Benz-Strasse 10, 72124
Pliezhausen (DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) LOHMÜLLER, Jürgen [DE/DE]; Unterer
Mühlweg 7, 72762 Reutlingen (DE).
(81) CN IL JP KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/00
(11) WO 01/84599 (13) A2
(21) PCT/US01/12897
(22) 19 Apr/avr 2001 (19.04.2001)
(25) en (26) en
(30) 09/565,691 1 May/mai 2000 US
(01.05.2000)
(43) 8 Nov/nov 2001 (08.11.2001)
(54) UV-ENHANCED SILYLATION
PROCESS TO INCREASE ETCH RE-
SISTANCE OF ULTRA THIN RESISTS
PROCEDE DE SILYLATION AME-
LIORE PAR L’APPLICATION D’UL-
TRAVIOLETS POUR AUGMENTER
LA RESISTANCE A L’ATTAQUE DE
RESISTS ULTRAMINCES
(71) ADVANCED MICRO DEVICES, INC.
[US/US]; One AMD Place, Mail Stop 68;
P.O. Box 3453, Sunnyvale, CA 94088-3453
(US).
(72) RANGARAJAN, Bharath; 2295 Dolores
Avenue, Santa Clara, CA 95050 (US). SUB-
RAMANIAN, Ramkumar; 4271 Norwalk
Drive #X-105, San Jose, CA 95129 (US).
PHAN, Khoi, A.; 3841 Thousand Oaks
Drive, San Jose, CA 95136 (US). SINGH,
Bhanwar; 17122 Heatherwood Way, Morgan
Hill, CA 95037 (US). TEMPLETON,
Michael, K.; 80 Fifteenth Avenue, Atherton,
CA 94027 (US). YEDUR, Sanjay, K.; 444
Saratoga Avenue #27A, Santa Clara, CA
95050 (US). CHOO, Bryan, K.; 234 Escuela
Avenue #74, Mountain View, CA 94040
(US).
(74) RODDY, Richard, J.; Advanced Micro Devices,
Inc., One AMD Place, Mail Stop 68,
Sunnyvale, CA 94088-3453 (US).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CO CR CU CZ DE DK
DM DZ EE ES FI GB GD GE GH GM HR
HU ID IL IN IS JP KE KG KP KR KZ LC
LK LR LS LT LU LV MA MD MG MK MN
MW MX MZ NO NZ PL PT RO RU SD SE
SG SI SK SL TJ TM TR TT TZ UA UG UZ
VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/00, 21/66, G01R 31/26
(11) WO 01/84600
(21) PCT/US01/13346
(13) A1
(22) 25 Apr/avr 2001 (25.04.2001)
(25) en (26) en
(30) 60/200,302 28 Apr/avr 2000
(28.04.2000)
US
(30) Not furnished / 23 Apr/avr 2001 US
non communiqué (23.04.2001)
(43) 8 Nov/nov 2001 (08.11.2001)
(54) PROCESS PERTURBATION TO MEA-
SURED-MODELED METHOD FOR
SEMICONDUCTOR DEVICE TECH-
NOLOGY MODELING
PERTURBATION DE PROCESSUS
DESTINEE A UN PROCEDE ME-
SURE-MODELISATION POUR MO-
DELISATION DE TECHNOLOGIE DE
DISPOSITIF A SEMI-CONDUCTEUR
(71) TRW, INC. [US/US]; One Space Park, Redondo
Beach, CA 90278 (US).
(72) TSAI, Roger, S.; 22499 Kent Avenue, Torrance,
CA 90505 (US).
(74) PANIAGUAS, John, S.; Katten Muchin
Zavis, 525 West Monroe Street, Suite 1600,
Chicago, IL 60661 (US) et al. / etc.
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CR CU CZ DE DK DM
DZ EE ES FI GB GD GE GH GM HR HU
ID IL IN IS JP KE KG KP KR KZ LC LK
LR LS LT LU LV MA MD MG MK MN MW
MX MZ NO NZ PL PT RO RU SD SE SG SI
SK SL TJ TM TR TT TZ UA UG UZ VN YU
ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/00
(11) WO 01/84601 (13) A2
(21) PCT/US01/14097
(22) 2 May/mai 2001 (02.05.2001)
(25) en (26) en
(30) 60/201,845 3 May/mai 2000 US
(03.05.2000)
(30) 09/748,526 21 Dec/déc 2000 US
(21.12.2000)
(43) 8 Nov/nov 2001 (08.11.2001)
(54) IMPLANTATION PROCESS USING
SUB-STOICHIOMETRIC, OXYGEN
DOSES AT DIFFERENT ENERGIES
PROCEDE D’IMPLANTATION UTI-
LISANT DES DOSES D’OXYGENE
INFERIEURES A LA STOECHIOME-
TRIE A DES ENERGIES DIFFERENTES
(71) IBIS TECHNOLOGY, INC. [US/US]; 32A
Cherry Hill Drive, Danvers, MA 01923 (US).
(72) DOLAN, Robert, P.; 2 Hazelwood Road,
Hudson, NH 03051 (US). CORDTS, Bernhardt,
F.; 5 Lilliam Drive, Ipswich, MA
01938 (US). ANC, Maria, J.; 55 Foley
Drive, Marlborough, MA 01752 (US).
ALLES, Michael, L.; 43 Cole Street, Beverly,
MA 01915 (US).
(74) ENGELLENNER, Thomas, J. et al. / etc.;
Nutter, McClennen & Fish, LLP, One International
Place, Boston, MA 02110-2699 (US).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CO CR CU CZ DE DK
DM DZ EE ES FI GB GD GE GH GM HR
HU ID IL IN IS JP KE KG KP KR KZ LC
LK LR LS LT LU LV MA MD MG MK MN
MW MX MZ NO NZ PL PT RO RU SD SE
SG SI SK SL TJ TM TR TT TZ UA UG UZ
VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
Declaration / Déclaration :
(s) for all designations / pour toutes les
désignations
(51) 7 H01L 21/00
(11) WO 01/84602 (13) A2
(21) PCT/US01/40620
(22) 27 Apr/avr 2001 (27.04.2001)