PCT/2001/45 - World Intellectual Property Organization

45/2001
20340 PCT Gazette - Section I - Gazette du PCT 8 Nov/nov 2001
(25) en (26) en
(30) 09/564,178 3 May/mai 2000 US
(03.05.2000)
(43) 8 Nov/nov 2001 (08.11.2001)
(54) METHOD OF FORMING A SHAL-
LOW AND DEEP TRENCH ISOLATION
(SDTI) SUITABLE FOR SILICON ON
INSULATOR (SOI) SUBSTRATES
PROCEDE SERVANT A CREER UNE
ISOLATION DE TRANCHEE PEU PRO-
FONDE ET PROFONDE (SDTI) POUR
DES SUBSTRATS ISOLANTS (SOI)
RECOUVERTS DE SILICIUM
(71) MAXIM INTEGRATED PRODUCTS,
INC. [US/US]; 120 San Gabriel Drive, Sunnyvale,
CA 94068 (US).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) KALNITSKY, Alexander [US/US];
10095 N.W. Fleetwood Drive, Portland,
OR 97229 (US). CHOUTOV, Dmitri, A.
[US/US]; 3154 Cortona Drive, San Jose,
CA 95135 (US). SCHEER, Robert, F.
[US/US]; 01837 S.W. Greenwood Road,
Portland, OR 97219 (US). YANG, Fanling,
H. [US/US]; 14185 S.W. Stirrup Street,
Beaverton, OR 97008 (US). DOBSON,
Thomas, W. [US/US]; 3465 S.W. Bridlemile,
Portland, OR 97221 (US). YAMAGUCHI,
Tadanori [JP/US]; 12757 N.W. Hartford
Street, Portland, OR 97229 (US). STUTZIN,
Geoffrey, C. [US/US]; 121 Brook Street,
San Carlos, CA 94070 (US). LIAO, Ken
[US/US]; 8260 S.W. Secretariat Terrace,
Beaverton, OR 97008 (US).
(74) BLAKELY, Roger, W. et al. / etc.; Blakely,
Sokoloff, Taylor & Zafman, 7th Floor, 12400
Wilshire Boulevard, Los Angeles, CA 90025-
1026 (US).
(81) CN JP KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/00
(11) WO 01/84603
(21) PCT/US01/08409
(13) A1
(22) 15 Mar/mar 2001 (15.03.2001)
(25) en (26) en
(30) 60/199,480 25 Apr/avr 2000
(25.04.2000)
US
(30) 09/591,163 9 Jun/juin 2000
(09.06.2000)
US
(43) 8 Nov/nov 2001 (08.11.2001)
(54) SYSTEM AND METHOD FOR ILLU-
MINATING A SEMICONDUCTOR PRO-
CESSING SYSTEM
DISPOSITIF D’ECLAIRAGE POUR
SYSTEME DE TRAITEMENT DE
SEMI-CONDUCTEURS ET PROCEDE
CORRESPONDANT
(71) ADVANCED MICRO DEVICES, INC.
[US/US]; One AMD Place, Mail Stop 68,
P.O. Box 3453, Sunnyvale, CA 94088-3453
(US).
(72) SINGH, Bhanwar; 17122 Heatherwood
Way, Morgan Hill, CA 95037 (US). RAN-
GARAJAN, Bharath; 2295 Dolores Avenue,
Santa Clara, CA 95050 (US). PHAN, Khoi,
A.; 3841 Thousand Oaks Drive, San Jose, CA
95136 (US). CHOO, Bryan, K.; 234 Escuela
Avenue #74, Mountain View, CA 94040
(US). SUBRAMANIAN, Ramkumar; 4271
Norwalk Drive #X-105, San Jose, CA 95129
(US).
(74) RODDY, Richard, J.; Advanced Micro Devices,
Inc., One AMD Place, Mail Stop 68,
Sunnyvale, CA 94088-3453 (US).
(81) BR CN JP KR SG.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/02
(11) WO 01/84604 (13) A2
(21) PCT/EP01/04525
(22) 20 Apr/avr 2001 (20.04.2001)
(25) de (26) de
(30) 09/560,541 28 Apr/avr 2000 US
(28.04.2000)
(43) 8 Nov/nov 2001 (08.11.2001)
(54) METHOD FOR PRODUCING AN INTE-
GRATED CAPACITOR
PROCEDE DE PRODUCTION D’UN
CONDENSATEUR INTEGRE
(71) INFINEON TECHNOLOGIES AG
[DE/DE]; St.-Martin-Str. 53, 81669 München
(DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) AUGUSTIN, Andreas [DE/DE]; Amselstr.
10, 85630 Grasbrunn (DE). KLEIN,
Wolfgang [DE/DE]; Am Wall 15, 85604
Zorneding (DE). BARTH, Hans-Joachim
[DE/DE]; Lützowstr. 19 A, 81245 München
(DE).
(74) BARTH, Stephan; Reinhard, Skuhra, Weise
& Partner GbR, Postfach 44 01 51, 80750
München (DE).
(81) JP KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/02
(11) WO 01/84605
(21) PCT/EP01/04786
(13) A1
(22) 27 Apr/avr 2001 (27.04.2001)
(25) de (26) de
(30) 100 22 655.8 28 Apr/avr 2000
(28.04.2000)
DE
(43) 8 Nov/nov 2001 (08.11.2001)
(54) METHOD FOR PRODUCING CAPACI-
TOR STRUCTURES
PROCEDE DE FABRICATION DE
STRUCTURES DE CONDENSATEUR
(71) INFINEON TECHNOLOGIES AG
[DE/DE]; St.-Martin-Strasse 53, 81669
München (DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) HARTNER, Walter [DE/US]; 10711
Toston Lane, Glen Allen, VA 23060 (US).
SCHNABEL, Rainer, Florian [DE/DE];
Lerchenstrasse 6C, 85635 Höhenkirchen
(DE). SCHINDLER, Günther [DE/DE];
Ungererstrasse 9, 80802 München (DE).
(74) GINZEL, Christian et al. / etc.; Zimmermann
& Partner, Postfach 330 920, 80069
München (DE).
(81) JP KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/02, 21/68
(11) WO 01/84606
(21) PCT/JP01/03635
(13) A1
(22) 26 Apr/avr 2001 (26.04.2001)
(25) ja (26) ja
(30) 2000-128502 27 Apr/avr 2000
(27.04.2000)
JP
(43) 8 Nov/nov 2001 (08.11.2001)
(54) SEMICONDUCTOR WAFER AND
DEVICE FOR SEMICONDUCTOR DE-
VICE MANUFACTURING PROCESS
PLAQUETTE DE SEMI-CONDUCTEUR
ET DISPOSITIF POUR PROCEDE DE
FABRICATION D’UN DISPOSITIF A
SEMI-CONDUCTEURS
(71) SHIN-ETSU HANDOTAI CO., LTD.
[JP/JP]; 4-2, Marunouchi 1-chome, Chiyoda-ku,
Tokyo 100-0005 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) DEMIZU, Kiyoshi [JP/JP]; c/o
Shin-Etsu Handotai Co., Ltd., 4-2,
Marunouchi 1-chome, Chiyoda-ku, Tokyo
100-0005 (JP). KATO, Tadahiro [JP/JP];
c/o Shin-Etsu Handotai Co., Ltd., Shirakawa
R & D Center, 150, Aza Ohira,
Oaza Odakura, Nishigo-mura, Nishishirakawa-gun,
Fukushima 961-8061 (JP).
NETSU, Shigeyoshi [JP/JP]; c/o Shin-Etsu
Handotai Co., Ltd., Shirakawa R & D
Center, 150, Aza Ohira, Oaza Odakura,
Nishigo-mura, Nishishirakawa-gun,
Fukushima 961-8061 (JP).
(74) TAKAHASHI, Masahisa; Room 1003, Ambassador
Roppongi Buildings, 16-13, Roppongi
3-chome, Minato-ku, Tokyo 106-0032
(JP).
(81) JP KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/02
(11) WO 01/84607
(21) PCT/US01/14242
(13) A1
(22) 2 May/mai 2001 (02.05.2001)
(25) en (26) en
(30) 09/562,556 2 May/mai 2000
(02.05.2000)
US
(43) 8 Nov/nov 2001 (08.11.2001)
(54) CAPACITOR STACK STRUCTURE
AND METHOD OF FABRICATING
STRUCTURE DE PILE DE CONDEN-
SATEUR ET SON PROCEDE DE FABRI-
CATION
(71) INFINEON TECHNOLOGIES NORTH
AMERICA CORP. [US/US]; 1730 North
First Street, San Jose, CA 95112-4508
(US). INTERNATIONAL BUSINESS MA-
CHINES CORPORATION [US/US]; New
Orchard Road, Armonk, NY 10504 (US).
(72) WANG, Yun-Yu; 34 Cypher Lane,
Poughquag, NY 12570 (US). JAMMY,