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Chemkin 4.1.1 Chapter 4: Materials Problems Figure 4-32 Spacial Chlorine Plasma—Cl + and Cl 2 + Mole Fractions The electron temperature rises somewhat in the lower-power regions of the reactor tube. This is consistent with the inverse trend between electron densities and electron temperatures seen at low power densities in Section 4.3.1. Figure 4-33 Spacial Chlorine Plasma—Electron Temperature © 2007 Reaction Design 148 RD0411-C20-000-001
Chapter 4: Materials Problems <strong>Tutorials</strong> <strong>Manual</strong> 4.3.3 Fluorocarbon Plasma Etching of Silicon Dioxide 4.3.3.1 Project Description This user tutorial is an example of modeling a low-pressure plasma reactor as a steady-state Perfectly Stirred Reactor, using the fluorocarbon plasma chemistry set described in Section 4.4.6. This example is representative of a high-density plasma, with a plasma power of 3000 Watts and a pressure of 10 mtorr. Pure hexafluoroethane is the inlet gas. The energy equation and the electron energy equation are solved, and a heat-transfer correlation is used to account for heat loss through the wall of the reactor. This example illustrates the use of multiple materials, each with a different set of surface reactions, as well as the use of continuations with varying flow rate and ion impact energy. 4.3.3.2 Project Setup The project file is called plasma_psr__c2f6_etch.ckprj. The data files used for this sample are located in the samples\plasma_psr__c2f6_etch directory. This reactor diagram contains a gas inlet and a plasma PSR. The reactant gas mixture, which is pure C 2 F 6 in this case, is input on the Speciesspecific Property tab of the C1_Inlet1 panel. The gas flow rate (30 sccm), inlet gas temperature and inlet electron temperature are input on the Stream Property tab of the R1_IN1 panel. The latter is required, but has little impact on the solution unless there are electrons in the input gas mixture. The C1_ Plasma PSR panel is where most of the parameters are input. The Reactor Physical Property tab allows selection of problem type, as well as places to enter parameters such as the plasma power, pressure (10 mTorr), volume, internal area, heat loss parameters, cross-section for electron momentum loss, and initial guesses for the electron, neutral, and ion temperatures. The Species-specific Data tab allows input of initial guesses for the steady-state gas composition, surface site fractions, and bulk activities, on the corresponding sub-tabs, as well as species-specific values for electron-momentum loss cross-sections. A good initial guess for the gas and surface compositions (one that is close to the steady-state solution) will result in fast convergence, while a poor initial guess can lead to failure of the simulation. The Bulkphase -specific Data tab is used to indicate that all the bulk materials are being etched, which affects some of the equations. The Material-specific Properties tab is for specifying properties like surface temperature (if different from the neutral gas temperature), ion energy or bias power, Bohm factor, sheath energy loss factor, area fraction, or heat loss, either for all materials, or on a per-material basis. For this nonparameter-study problem, the bottom part of the panel is used to set up values that are dependent on the material. Material-independent properties can be set on the RD0411-C20-000-001 149 © 2007 Reaction Design
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Chemkin 4.1.1 Contents Table of Con
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Chemkin 4.1.1 Tables List of Tables
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Tutorials Manual 4.1.1 Figures List
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List of Figures Tutorials Manual 2-
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Chemkin 4.1.1 1 1 Introduction The
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Chemkin 4.1.1 2 2 Combustion in Gas
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Chapter 2: Combustion in Gas-phase
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Chemkin 4.1.1 3 3 Catalytic Process
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Tutorials Manual

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