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CHEMKIN 4.1.1 Table of Contents 3.1.2 Engine Exhaust Aftertreatment with a Transient Inlet Flow...............................................101 3.2 Parameter Studies.....................................................................................................................................108 3.2.1 Parameter Study Facility for Surface Chemistry Analysis .................................................108 3.3 Chemistry Sets...........................................................................................................................................112 3.3.1 Methane Oxidation on Pt.........................................................................................................112 3.3.2 Pt/Rh Three-way Catalyst .......................................................................................................113 4 Materials Problems ................................................................................................................................................115 4.1 Chemical Vapor Deposition......................................................................................................................115 4.1.1 Equilibrium Analysis of Chlorosilane CVD............................................................................116 4.1.2 PSR Analysis of Steady-state Thermal CVD .......................................................................118 4.1.3 Approximations for a Cylindrical Channel Flow...................................................................122 4.1.4 Deposition in a Rotating Disk Reactor ..................................................................................126 4.1.5 Trichlorosilane CVD in Planar Channel Flow Reactor........................................................131 4.2 Atomic Layer Deposition (ALD) ...............................................................................................................134 4.2.1 Time-dependent Simulations of ALD Process.....................................................................135 4.3 Plasma Etching ..........................................................................................................................................141 4.3.1 Steady-state Chlorine Plasma................................................................................................141 4.3.2 Spacial Chlorine Plasma PFR with Power Profile...............................................................145 4.3.3 Fluorocarbon Plasma Etching of Silicon Dioxide.................................................................149 4.4 Chemistry Sets...........................................................................................................................................154 4.4.1 Silicon Nitride CVD from Silicon Tetrafluoride and Ammonia ...........................................154 4.4.2 Silicon Deposition from Silane................................................................................................155 4.4.3 Silicon Deposition from Trichlorosilane.................................................................................155 4.4.4 Alumina ALD .............................................................................................................................156 4.4.5 Chlorine Plasma .......................................................................................................................158 4.4.6 Fluorocarbon Plasma with SiO 2 Etch Products...................................................................159 5 Chemical Mechanism Analysis ...........................................................................................................................161 5.1 Mechanism Analyzer.................................................................................................................................161 5.1.1 Background Information ..........................................................................................................162 5.1.2 Reaction Mechanism for Diamond CVD ...............................................................................164 Index ..........................................................................................................................................................................177 © 2007 Reaction Design 4 RD0411-C20-000-001
Chemkin 4.1.1 Tables List of Tables 1-1 Reactor Models Used in Sample Problems...................................................................................................................14 2-1 Reactant Mole Fractions Sum to 1.0.............................................................................................................................19 2-2 Relative Moles Normalized So Mole Fractions Sum to 1.0 ...........................................................................................19 2-3 N 2 as Added Diluent .....................................................................................................................................................20 2-4 N 2 as Component of Oxidizer .......................................................................................................................................20 2-5 Determining Stoichiometric Products ............................................................................................................................21 2-6 Initial Temperatures and Ignition Times .......................................................................................................................30 2-7 Test Engine Specifications ............................................................................................................................................50 2-8 Composition of Initial Gas Mixture.................................................................................................................................51 2-9 Components in Fuel and Oxidizer Streams...................................................................................................................70 2-10 Properties of the Co-flowing Jets ..................................................................................................................................73 3-1 Excerpt of Data Representing Engine-out Test Measurements..................................................................................103 RD0411-C20-000-001 5 © 2007 Reaction Design
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Chemkin 4.1.1 3 3 Catalytic Process
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Chemkin 4.1.1 4 4 Materials Problem
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Tutorials Manual 4.1.1 Index Index
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Tutorials Manual

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