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Tutorials Manual

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Chemkin 4.1.1<br />

Chapter 5: Chemical Mechanism Analysis<br />

One must supply a diffusion coefficient in Equation 5-2 to evaluate Da. To do this, THE<br />

Mechanism Analyzer requires the user to name a “major species” and a “carrier gas<br />

species.” Through internal calls to the TRANSPORT Subroutine Library, CHEMKIN<br />

evaluates the binary diffusion coefficient between these two species at the specified<br />

bath temperature and pressure. The user may also specify the length scale L. The<br />

default value for L is 1 cm.<br />

For each gas-phase reaction, a report is generated of k * and Da for the forward and<br />

reverse directions. In some cases, the input CHEMKIN reaction mechanism specifies<br />

the reaction to be irreversible. In these cases, the quantities k * and Da are still<br />

calculated for the reverse direction, but the numbers are enclosed in square brackets<br />

[ ] to flag these reactions as not being part of the mechanism.<br />

A uniform-dimensional rate constant of Equation 5-1 is also calculated for surface<br />

*<br />

reactions. In this case, k has units of mole • cm -2 •sec -1 f . Thus, one can make a<br />

comparison between reaction rates for surface reactions. The surface Damköhler<br />

number is defined to be<br />

Equation 5-3<br />

Da<br />

=<br />

k f<br />

*<br />

--------------------<br />

DG [ ] ⁄ L<br />

The equation for the surface Damköhler number differs from the equation for the gasphase<br />

Damköhler number by a factor of the length scale L. As before, it provides a<br />

measure of the relative speed of the surface reaction rate versus the molecular mass<br />

transport rate.<br />

5.1.2 Reaction Mechanism for Diamond CVD<br />

5.1.2.1 Project Description<br />

This user tutorial demonstrates the use of the Mechanism Analyzer model to extract a<br />

wider variety of detailed thermodynamic, chemical kinetic, and transport data from a<br />

CHEMKIN reaction mechanism. The chemistry set nominally describes a diamond CVD<br />

process and is a subset of a published mechanism, 42 but one that has now been<br />

superseded by the authors. 43 The reactions in this example, especially the surface<br />

reactions, have been contrived to demonstrate the capabilities of the Mechanism<br />

Analyzer and should not be used as a source of kinetic data for diamond deposition.<br />

42.“Analysis of diamond growth in subatmospheric dc plasma-gun reactors.” Michael E. Coltrin and<br />

David S. Dandy, Journal of Applied Physics, 74(#9):5803 (1993).<br />

© 2007 Reaction Design 164 RD0411-C20-000-001

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