Tutorials Manual

More documents

Recommendations

Info

Chemkin 4.1.1 Chapter 4: Materials Problems Figure 4-36 Fluorocarbon Plasma Etching of Silicon Dioxide—Positive Ion Mole Fractions The surface site fractions shown in Figure 4-37 show minor changes with conditions. Comparing solutions 1 and 3 shows that increasing the Wafer ion energy increases the fraction of open sites and decreases the fraction of fluorocarbon-covered sites. This is consistent with the increased ion energy causing an increase in yield for the ion-enhanced etching reactions. Comparing solutions 3 and 2 shows that increasing the C 2 F 6 flow rate decreases the fraction of open sites and increases the fraction of fluorocarbon-covered sites. This is consistent with an increased supply of fluorocarbon radicals that can react with the open sites. Figure 4-38 shows the 5 reactions with the largest contribution to the loss of silicon dioxide from the wafer. In order of decreasing importance, surface reactions 13, 14, 11, and 12 are etching of WSIO2_CF2(S) sites assisted by CF + , F + , CF + 2 , and CF + 3 , respectively. Reaction 5 is the F + ion-assisted etching reaction of the WSIO2_F2(S) site. These five reactions are responsible for most of the etching, but a number of other reactions contribute to the total etch rate. © 2007 Reaction Design 152 RD0411-C20-000-001
Chapter 4: Materials Problems <strong>Tutorials</strong> <strong>Manual</strong> Figure 4-37 Fluorocarbon Plasma Etching of Silicon Dioxide—Surface Site Fractions Figure 4-38 Fluorocarbon Plasma Etching of Silicon Dioxide—Highest ROP RD0411-C20-000-001 153 © 2007 Reaction Design
Page 1 and 2:
August 3, 2007 1:53 am Release 4.1.
Page 3 and 4:
Chemkin 4.1.1 Contents Table of Con
Page 5 and 6:
Chemkin 4.1.1 Tables List of Tables
Page 7 and 8:
Tutorials Manual 4.1.1 Figures List
Page 9 and 10:
List of Figures Tutorials Manual 2-
Page 11 and 12:
List of Figures Tutorials Manual 4-
Page 13 and 14:
Chemkin 4.1.1 1 1 Introduction The
Page 15 and 16:
Chapter 1: Introduction Tutorials M
Page 17 and 18:
Chemkin 4.1.1 2 2 Combustion in Gas
Page 19 and 20:
Chapter 2: Combustion in Gas-phase
Page 21 and 22:
Page 23 and 24:
Page 25 and 26:
Page 27 and 28:
Page 29 and 30:
Page 31 and 32:
Page 33 and 34:
Page 35 and 36:
Page 37 and 38:
Page 39 and 40:
Page 41 and 42:
Page 43 and 44:
Page 45 and 46:
Page 47 and 48:
Page 49 and 50:
Page 51 and 52:
Page 53 and 54:
Page 55 and 56:
Page 57 and 58:
Page 59 and 60:
Page 61 and 62:
Page 63 and 64:
Page 65 and 66:
Page 67 and 68:
Page 69 and 70:
Page 71 and 72:
Page 73 and 74:
Page 75 and 76:
Page 77 and 78:
Page 79 and 80:
Page 81 and 82:
Page 83 and 84:
Page 85 and 86:
Page 87 and 88:
Page 89 and 90:
Page 91 and 92:
Chemkin 4.1.1 3 3 Catalytic Process
Page 93 and 94:
Chapter 3: Catalytic Processes Tuto
Page 95 and 96:
Page 97 and 98:
Page 99 and 100:
Page 101 and 102: Chapter 3: Catalytic Processes Tuto
Page 115 and 116: Chemkin 4.1.1 4 4 Materials Problem
Page 117 and 118: Chapter 4: Materials Problems Tutor
Page 151: Chapter 4: Materials Problems Tutor
Page 161 and 162: Chemkin 4.1.1 5 5 Chemical Mechanis
Page 163 and 164: Chapter 5: Chemical Mechanism Analy
Page 177 and 178: Tutorials Manual 4.1.1 Index Index
Page 179 and 180: Index Tutorials Manual normalized s
show all

Tutorials Manual

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?