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Tutorials Manual

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Chapter 1: Introduction<br />

<strong>Tutorials</strong> <strong>Manual</strong><br />

Table 1-1<br />

Reactor Models Used in Sample Problems (Continued)<br />

Tutorial<br />

3.1.2 Engine Exhaust Aftertreatment with a Transient<br />

Inlet Flow<br />

3.2.1 Parameter Study Facility for Surface Chemistry<br />

Analysis<br />

Reactor Models Used<br />

Perfectly Stirred Reactor<br />

Honeycomb Catalytic Reactor<br />

4.1.1 Equilibrium Analysis of Chlorosilane CVD Equilibrium<br />

4.1.2 PSR Analysis of Steady-state Thermal CVD Plasma Perfectly Stirred Reactor<br />

4.1.3 Approximations for a Cylindrical Channel Flow Plasma Perfectly Stirred Reactor<br />

Plug Flow Reactor<br />

Cylindrical Shear Flow<br />

4.1.4 Deposition in a Rotating Disk Reactor Rotating Disk CVD Reactor<br />

4.1.5 Trichlorosilane CVD in Planar Channel Flow<br />

Reactor<br />

Planar Shear Flow<br />

4.2.1 Time-dependent Simulations of ALD Process Perfectly Stirred Reactor<br />

Stagnation Flow CVD Reactor<br />

4.3.1 Steady-state Chlorine Plasma Plasma Perfectly Stirred Reactor<br />

4.3.2 Spacial Chlorine Plasma PFR with Power Profile Plasma Plug Flow Reactor<br />

4.3.3 Fluorocarbon Plasma Etching of Silicon Dioxide Plasma Perfectly Stirred Reactor<br />

5.1.2 Reaction Mechanism for Diamond CVD Mechanism Analyzer<br />

RD0411-C20-000-001 15 © 2007 Reaction Design

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