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Noncontact Atomic Force Microscopy - Yale School of Engineering ...

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P.I-14<br />

Kelvin <strong>Force</strong> <strong>Microscopy</strong> Dynamic Behavior and Noise Propagation<br />

Heinrich Diesinger, Dominique Deresmes, Jean-Philippe Nys, and Thierry Mélin<br />

Institut d’Electronique, Microelectronique et Nanotechnologie, CNRS UMR 8520, Department<br />

ISEN,Avenue Henri Poincaré, 59652 Villeneuve d’Ascq, France<br />

The bandwidth <strong>of</strong> scanning probe control loops limits the sampling rate in data<br />

acquisition. In this work, the dynamic behavior <strong>of</strong> amplitude detection (AM) and<br />

frequency detection (FM) Kelvin force microscopy (KFM) setups is analyzed and<br />

optimized. Since enhanced bandwidth alone would increase speed at the cost <strong>of</strong> tolerating<br />

more noise, the origin <strong>of</strong> noise and its propagation within the control loops are studied in<br />

parallel.<br />

Laser Diode Photodetector<br />

F N = 4γk B T<br />

CPD<br />

V PD<br />

V PD, N = 10 μV/sqrt(Hz)<br />

In<br />

Lock-in<br />

Osc<br />

V<br />

bias, AC<br />

fres2 X<br />

PI Amplifier<br />

Kelvin Controller<br />

+<br />

Σ =<br />

+<br />

V Kelvin<br />

open closed<br />

Figure 1: Setup <strong>of</strong> the Kelvin control loop <strong>of</strong> an AM-KFM, consisting <strong>of</strong> a lock-in amplifier<br />

exciting the probe electrostatically at its second resonance, and a PI error amplifier to close the<br />

feedback loop and to apply the Kelvin voltage to the probe. The loop can be opened. Main noise<br />

sources are the thermal probe excitation force and white noise at the output <strong>of</strong> the photodetector.<br />

Fig. 1 shows the Kelvin control loop <strong>of</strong> an AM-KFM in ultrahigh vacuum, using the<br />

second cantilever resonance for KFM while distance control is based on the first, similar<br />

to the setup demonstrated by Kikukawa et al.[1]. The noise power spectral density <strong>of</strong> the<br />

Kelvin output signal can be modeled after the transfer functions <strong>of</strong> the different stages<br />

have been measured in open loop configuration. A benchmark criterium for comparing<br />

hardware with respect to noise is issued. An FM KFM close to the configuration<br />

suggested by Kitamura [2] is also analyzed. Advantages and drawbacks <strong>of</strong> both methods<br />

in terms <strong>of</strong> bandwidth and signal to noise are discussed.<br />

[1] A. Kikukawa, S. Hosaka, and R. Imura. Appl. Phys. Lett. 66, 3510 (1995).<br />

[2] S. Kitamura and M. Iwatsuki. Appl. Phys. Lett. 72, 3154 (1998)<br />

105

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