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Theory <strong>of</strong> Multifrequency Method in FM-AFM<br />

Zongmin Ma, Yoshitaka Naitoh, Yanjun Li, Masami Kageshima<br />

and Yasuhiro Sugawara<br />

Department <strong>of</strong> Applied Physics, Graduate <strong>School</strong> <strong>of</strong> <strong>Engineering</strong>, Osaka University, 2-1 Yamada-oka,<br />

Suita, Osaka 565-0871, Japan<br />

P.I-29<br />

FM-AFM has been succeeded in measuring topography and energy dissipation<br />

with atomic resolution on the surface. Furthermore, force spectroscopy is<br />

demonstrated to identify the atomic species. The elasticity information <strong>of</strong> the surface<br />

is important physical information <strong>of</strong> the sample materials. Actually, it has been<br />

measured by using multifrequency method in AM-AFM recently, which was proposed<br />

by Rodriguez and Garcia and successfully demonstrated its usefulness theoretically<br />

and experimentally [1-2].<br />

In this paper, for the first time, we<br />

proposed usage <strong>of</strong> the multifrequency<br />

f 2<br />

BPF PLL Δf 2<br />

method in FM-AFM to measure the<br />

AGC<br />

sample properties such as elasticity.<br />

Figure 1 shows the block diagram <strong>of</strong><br />

×<br />

multifrequency method in FM-AFM.<br />

f 1<br />

BPF PLL<br />

The cantilever is excited simultaneously<br />

at the first and the second resonances.<br />

Band pass filters (BPFs) are used to<br />

separate the vibration signals <strong>of</strong> the<br />

Optical<br />

interferometer<br />

+<br />

+<br />

AGC<br />

×<br />

cantilever. For each signal, the cantilever<br />

Cantilever<br />

Δf 1<br />

is vibrated by self-oscillation at the first<br />

Feedback<br />

and the second resonances. Topography<br />

Tube Scanner<br />

Topography<br />

<strong>of</strong> the sample is obtained by the<br />

feedback signal to keep the frequency<br />

Figure 1. Block diagram <strong>of</strong> multifrequency<br />

shift (△ f1) constant. The elasticity information <strong>of</strong> the sample surface is measured by<br />

frequency shift (△ f2) <strong>of</strong> the second resonance, which is proportional to the<br />

conservative force between tip and sample. Here, we show the theory for the<br />

multifrequency method in FM-AFM.<br />

[1] Rodriguez and R. Garcia, Appl. Phys. Lett. 84, 449 (2004).<br />

[2] Jose R. Lozano and Ricardo Garcia. Phy Rev B 79, 014110 (2009).<br />

120

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