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Noncontact Atomic Force Microscopy - Yale School of Engineering ...

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<strong>Noncontact</strong> observation in liquid with van der Pol-type FM-AFM<br />

M. Kuroda 1 , H. Yabuno 2 , T. Someya 3 , R. Kokawa 4 , and M. Ohta 4<br />

1 National Institute <strong>of</strong> Advanced Industrial Science and Technology (AIST), Tsukuba, Japan<br />

2 Department <strong>of</strong> Mechanical <strong>Engineering</strong>, Keio University, Yokohama, Japan<br />

3 Mitsubishi Heavy Industries Ltd., Hiroshima, Japan<br />

4 Analytical & Measuring Instruments Division, Shimadzu Corp., Kyoto, Japan<br />

<strong>Atomic</strong> force microscopy (AFM) is crucial for nanobiotechnology<br />

studies. Observing bio-related samples<br />

in liquids using AFM is important, but deformable,<br />

uneven, and easily damaged surfaces <strong>of</strong> such<br />

specimens require non-contact AFM observation.<br />

For probe-cantilever excitation, the eigenfrequency<br />

must be estimated based on frequency response<br />

characteristics for the external excitation method. It<br />

cannot estimate the probe cantilever’s eigenfrequency<br />

precisely because <strong>of</strong> many spurious peaks (Fig. 1). But,<br />

the self-excitation method needs fine adjustment <strong>of</strong> the<br />

linear feedback gain near the oscillation limit by an<br />

automatic gain controller (AGC) to prevent the probe<br />

cantilever from touching the sample surface:<br />

oscillation can easily halt, disabling the observation.<br />

In solving those problems, van der Pol-type (vdP)<br />

self-excited oscillation represents a positive use <strong>of</strong><br />

nonlinearity [1–2]. Along with conventional positive<br />

linear velocity feedback for self-excited oscillation,<br />

vdP self-excited oscillation is realized by adding<br />

nonlinear feedback proportional to the squared<br />

deflection times the velocity. With the eigenfrequency<br />

component alone (Fig. 2), vdP self-excited oscillation<br />

guarantees existence <strong>of</strong> a stable stationary amplitude.<br />

Increased nonlinear feedback gain reduces the response<br />

amplitude but retains the high gain linear feedback.<br />

A 19-nm-high SiN4 surface pattern with 3 μm pitch<br />

was observed in pure water using vdP-AFM (Fig. 3).<br />

The smaller probe-cantilever vibration amplitude than<br />

the probe-cantilever – sample gap verifies noncontact<br />

observation. The vdP-AFM takes sample surface<br />

images with equal accuracy to that <strong>of</strong> contact-mode<br />

AFM. Even in liquid, oscillation continues.<br />

[1] H. Yabuno et al. Nonlinear Dynamics 54, 137 (2008).<br />

[2] M. Kuroda et al. Journal <strong>of</strong> System Design and Dynamics 2-3, 886 (2008).<br />

145<br />

P.II-17<br />

Figure 1: Frequency response<br />

curve in pure water (External<br />

excitation method)<br />

f=54.4 kHz<br />

Figure 2: Power spectrum in pure<br />

water (vdP self-excited oscillation<br />

method)<br />

Figure 3: Sample observed in pure<br />

water by vdP FM-AFM

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