Noncontact Atomic Force Microscopy - Yale School of Engineering ...
Noncontact Atomic Force Microscopy - Yale School of Engineering ...
Noncontact Atomic Force Microscopy - Yale School of Engineering ...
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<strong>Noncontact</strong> observation in liquid with van der Pol-type FM-AFM<br />
M. Kuroda 1 , H. Yabuno 2 , T. Someya 3 , R. Kokawa 4 , and M. Ohta 4<br />
1 National Institute <strong>of</strong> Advanced Industrial Science and Technology (AIST), Tsukuba, Japan<br />
2 Department <strong>of</strong> Mechanical <strong>Engineering</strong>, Keio University, Yokohama, Japan<br />
3 Mitsubishi Heavy Industries Ltd., Hiroshima, Japan<br />
4 Analytical & Measuring Instruments Division, Shimadzu Corp., Kyoto, Japan<br />
<strong>Atomic</strong> force microscopy (AFM) is crucial for nanobiotechnology<br />
studies. Observing bio-related samples<br />
in liquids using AFM is important, but deformable,<br />
uneven, and easily damaged surfaces <strong>of</strong> such<br />
specimens require non-contact AFM observation.<br />
For probe-cantilever excitation, the eigenfrequency<br />
must be estimated based on frequency response<br />
characteristics for the external excitation method. It<br />
cannot estimate the probe cantilever’s eigenfrequency<br />
precisely because <strong>of</strong> many spurious peaks (Fig. 1). But,<br />
the self-excitation method needs fine adjustment <strong>of</strong> the<br />
linear feedback gain near the oscillation limit by an<br />
automatic gain controller (AGC) to prevent the probe<br />
cantilever from touching the sample surface:<br />
oscillation can easily halt, disabling the observation.<br />
In solving those problems, van der Pol-type (vdP)<br />
self-excited oscillation represents a positive use <strong>of</strong><br />
nonlinearity [1–2]. Along with conventional positive<br />
linear velocity feedback for self-excited oscillation,<br />
vdP self-excited oscillation is realized by adding<br />
nonlinear feedback proportional to the squared<br />
deflection times the velocity. With the eigenfrequency<br />
component alone (Fig. 2), vdP self-excited oscillation<br />
guarantees existence <strong>of</strong> a stable stationary amplitude.<br />
Increased nonlinear feedback gain reduces the response<br />
amplitude but retains the high gain linear feedback.<br />
A 19-nm-high SiN4 surface pattern with 3 μm pitch<br />
was observed in pure water using vdP-AFM (Fig. 3).<br />
The smaller probe-cantilever vibration amplitude than<br />
the probe-cantilever – sample gap verifies noncontact<br />
observation. The vdP-AFM takes sample surface<br />
images with equal accuracy to that <strong>of</strong> contact-mode<br />
AFM. Even in liquid, oscillation continues.<br />
[1] H. Yabuno et al. Nonlinear Dynamics 54, 137 (2008).<br />
[2] M. Kuroda et al. Journal <strong>of</strong> System Design and Dynamics 2-3, 886 (2008).<br />
145<br />
P.II-17<br />
Figure 1: Frequency response<br />
curve in pure water (External<br />
excitation method)<br />
f=54.4 kHz<br />
Figure 2: Power spectrum in pure<br />
water (vdP self-excited oscillation<br />
method)<br />
Figure 3: Sample observed in pure<br />
water by vdP FM-AFM