Untersuchung des reaktiven Sputterprozesses zur Herstellung von ...

Literaturverzeichnis 167
SZYSZKA, B., 1999a. Reaktives Magnetronsputtern von transparenten und leitfähigen Oxid-
schichten. Dissertation, Justus-Liebig-Universität Gießen.
SZYSZKA, B., 1999b. Transparent and conductive aluminum doped zinc oxide films prepared
by mid-frequency reactive magnetron sputtering. Thin Solid Films 351, 164–169.
SZYSZKA, B. und JÄGER, S., 1997. Optical and electrical properties of doped zinc oxide films
prepared by ac reactive magnetron sputtering. Journal of Non-Crystaline Solids 218, 74–80.
SZYSZKA, B., SITTINGER, V.,JIANG, X., HONG, R.J.,WERNER, W.,PFLUG, A., RUSKE,
M. und LOPP, A., 2003. Transparent and conductive ZnO:Al films deposited by large area
reactive magnetron sputtering. Thin Solid Films 442, 179–183.
THORNTON, J. A., 1974. Influence of apparatus geometry and deposition conditions on the
structure and topography of thick sputtered coatings. Journal of Vacuum Science and Technology
11(4), 666.
THORNTON, J. A., 1986a. In-line sputtering system for depositing CuInSe2/CdS heterojunc-
tions. Journal of Solar Energy Engineering 108(4), 259–266.
THORNTON, J. A., 1986b. The microstructure of sputter-deposited coatings. Journal of Vacuum
Science and Technology A(4), 3059–3065.
TOMINAGA, K., KURODA, K. und TODA, O., 1988. Radiation effect due to energetic oxygen
atoms on conductive Al-doped ZnO films. Journal of Applied Physics 27, 1176.
TSUJI, T. und MITSUJI, H., 2000. Influence of oxygen partial pressure ion transparency and
conductivity of TF sputtered Al-doped ZnO thin films. Applied Surface Science 157, 47–51.
TU, K.N.undROSENBERG, R., 1991. Analytical Techniques for thin films, Bd. 27 (Academic
Press inc.).
VETTERL, O., FINGER, F.,CARIUS, R., HAPKE, P.,HOUBEN, L., KLUTH, O., LAMBERTZ,
A., MÜCK, A., RECH, B. und WAGNER, H., 2000. Intrinsic microcrystalline silicon: A new
material for photovoltaics. Solar Energy Materials & Solar Cells 62, 97–108.
VOSSEN, J. L., 1976. Transparent conducting films. Journal of Vacuum Science and Technology
13(1), 116.
WEBB, J. B., 1986. Conductivity imaging of the erosion pattern for ZnO prepared by planar r.f.
magnetron sputtering. Thin Solid Films 136, 135–139.