Untersuchung des reaktiven Sputterprozesses zur Herstellung von ...

Vorab-Veröffentlichungen
• HÜPKES, J., RECH, B., KLUTH, O., MÜLLER, J., SIEKMANN, H., AGASHE, C.,
BOCHEM, H.-P. und WUTTIG, M., 2003. Material Aspects of Reactively MF-Sputtered
Zinc Oxide for TCO Application in Silicon Thin Film Solar Cells. In MRS Spring Meeting
Proceedings, herausgegeben von Abelson, J. R., Ganguly, G., Matsumura, H., Robertson,
J. und Schiff, E. A., Bd. 762. Materials Research Society Symposium, S. A7.11.
• HÜPKES, J., RECH, B., KLUTH, O., REPMANN, T.,SEHRBROCK, B., MÜLLER, J.,
DRESE, R. und WUTTIG, M., 2004. Surface Textured MF-Sputtered ZnO Films for Microcrystalline
Silicon Based Thin-Film Solar Cells. In Technical Digest of the 14th International
Photovoltaic Science and Engineering Conference, Bd. I. Bangkok, Thailand, S.
379–380.
• HÜPKES, J., RECH, B., SEHRBROCK, B., OLIVER, K., MÜLLER, J., BOCHEM, H.-P.
und WUTTIG, M., 2004. Development of Surface-Textured Zinc Oxide For Thin Film
Solar Cells by High Rate Sputtering. In Proceedings of the 19 th European Photovoltaic
Solar Energy Conference, Paris, Bd. II. S. 1415–1418.
• HÜPKES, J., RECH, B., CALNAN, S., KLUTH, O., ZASTROW, U., SIEKMANN, H. und
WUTTIG, M., 2006. Material Study on Reactively Sputtered Zinc Oxide for Thin Film
Silicon Solar Cells. Thin Solid Films 502(1-2), 286–291.
• AGASHE, C., KLUTH, O., SCHÖPE, G., SIEKMANN, H., HÜPKES, J. und RECH, B.,
2003. Optimization of the Electrical Properties of Magnetron Sputtered Aluminum-doped
Zinc Oxide Films for Opto-electronic Applications. Thin Solid Films 442, 167–172.
• AGASHE, C., KLUTH, O., HÜPKES, J., ZASTROW, U., RECH, B. und WUTTIG, M.,
2004. Efforts to improve carrier mobility in radio frequency sputtered aluminum doped
zinc oxide films. Journal of Applied Physics 95(4), 1911–1917.
• KLUTH, O., SCHÖPE, G., HÜPKES, J., AGASHE, C., MÜLLER, J. und RECH, B., 2003.
Modified Thornton Model for Magnetron Sputtered Zinc Oxide: Film Structure and Etching
Behaviour. Thin Solid Films 442, 80–85.
• RECH, B., HÜPKES, J., MÜLER, J. und KLUTH, O., 2004. Transparente und leitfähige
Oxidschicht, Herstellung sowie Verwendung derselben in einer Dünnschichtsolarzelle.
Deutsches Patent, DE102004003760A1, Offenlegungstag: 18.08.2005.
iii