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Pfeiffer <strong>Vacuum</strong><br />
Page 106<br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Inlet Pressure<br />
100-1,200 mbar<br />
Heated Quartz Capillary<br />
HiPace 80<br />
MVP 015-2<br />
EVB 016 S<br />
LN 2 Cooling Trap<br />
UDV 040 with<br />
Gas Line<br />
QMA 400 with<br />
Crossbeam Ion Source<br />
SEM 217<br />
HiPace 80<br />
MVP 015-4<br />
EP 422<br />
Figure 4.18: Quadrupole mass spectrometer with gas inlet system,<br />
crossbeam ion source and cooling trap<br />
Process Chamber<br />
a) 50 mbar > p > 1 . 10 - 4 mbar<br />
UDV 040<br />
b) 10 mbar > p > 1 . 10 - 7 mbar<br />
SVV dual valve<br />
with 1 x orifice<br />
c) 10 mbar > p > 1 . 10 - 7 mbar<br />
HPI 010, manual,<br />
with 2x orifices<br />
p < 1 . 10 - 6 mbar<br />
HiPace 80<br />
PrismaPlus<br />
C-SEM open<br />
ion source<br />
MVP 015-4<br />
Figure 4.19: Differentially pumped quadrupole mass spectrometer<br />
with various gas inlets<br />
OMH<br />
400-5<br />
24 VDC<br />
OMH 422<br />
Quadera ®<br />
RS-232-C or<br />
optical waveguide cable<br />
RS-232-C oder<br />
LAN interface<br />
2 x relay outputs<br />
2 x analog inputs<br />
4 x analog outputs<br />
Power Supply<br />
www.pfeiffer-vacuum.net
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