Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
www.pfeiffer-vacuum.net<br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Page<br />
2.6 Roots vacuum pumps 46<br />
2.6.1 Design / Operating principle 47<br />
2.6.2 Calculations 50<br />
2.6.3 Application notes 50<br />
2.6.3.1 Backing pump selection 51<br />
2.6.4 Portfolio overview 52<br />
2.6.4.1 Standard pumps 53<br />
2.6.4.2 Standard pumps with magnetic coupling 53<br />
2.6.4.3 Explosion-protected pumps 53<br />
2.6.4.4 Pumping stations 54<br />
2.6.5 Accessories 54<br />
2.7 Side channel high vacuum pumps 56<br />
2.7.1 Design / Operating principle 56<br />
2.7.2 Application notes 56<br />
2.7.3 Portfolio overview 57<br />
2.8 Turbomolecular pumps 57<br />
2.8.1 Design / Operating principle 57<br />
2.8.1.1 Turbomolecular pump operating principle 58<br />
2.8.1.2 Holweck stage operating principle 61<br />
2.8.1.3 Turbopump performance data 63<br />
2.8.2 Application notes 64<br />
2.8.3 Portfolio overview 66<br />
2.8.3.1 Mechanical-bearing turbopumps 66<br />
2.8.3.2 Magnetic-levitation turbopumps 67<br />
2.8.3.3 Controls, displays and drives 68<br />
2.8.3.4 Accessories 70<br />
3 <strong>Vacuum</strong> Measuring Equipment 72<br />
3.1 Fundamentals of total pressure measurement 72<br />
3.1.1 Direct, gas-independent pressure measurement 72<br />
3.1.2 Indirect, gas-dependent pressure measurement 74<br />
Page 5<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>
Change language