Vacuum Technology Know How - Triumf

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Pfeiffer Vacuum Page 124 Vacuum Technology 1 1) Groove depth ~ See Table 6.1 2) Groove width See Table 6.1 2 Figure 6.1: O-ring in groove and corner positions Figure 6.2: Centering rings Centering ring with elastomer o-ring (ISO-KF) Centering ring with elastomer seal and outer ring (ISO-K) 45° www.pfeiffer-vacuum.net
www.pfeiffer-vacuum.net Trapezoid seals Elastomer seals having a trapezoid configuration or a similar cross section are used for valve seats and for the covers and doors of large vacuum chambers, for example, where they are tightly fitted to prevent them from being pulled out when the valve plate lifts or the chamber door is opened. Since enormous surface loads can occur in connection with large chamber dimensions, deformation of the seals is kept within the desired limits by attaching spacers in applications that involve large chamber doors. Flat seals should be avoided wherever possible in the field of vacuum technology, because it is difficult to achieve the pressure required for the sealing material to fill our all surface unevenness. Figure 6.3: Trapezoid seal with spacer Shaft seal rings / cap seals Radial shaft ring seals or cap seals are used to seal rotating shafts (Figure 6.4). In this connection, care should be taken to assure that only shaft seal rings with a metal ring that is fully coated in rubber are used. While these seals are quite tight in the static state, the fact must be taken into consideration that their leakage rate will be significantly higher when the shaft is in motion. Cap seals are only suitable for slow-running feedthroughs, e.g. for manually rotated feedthroughs. Metal seals Metal seals must be used instead of elastomer seals in high-temperature applications (e.g. baking out vacuum chambers), for high radiation loads and wherever very low permeation rates are the priority. Materials that are frequently used for metal seals are copper, aluminum, indium and in some cases silver and gold. Gold, silver and indium are usually used as wire seals; in addition to wire form, aluminum can also used as a profile seal. In the case of all metal seals, care must be taken to ensure that the specific contact forces (up to 6000 N per cm of seal length) are maintained. Page 125 Vacuum Technology
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Vacuum Vacuum Technology Technology
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Vacuum www.pfeiffer-vacuum.net Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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Formula 1-3 Definition of pressure
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Pa bar mbar μbar Torr micron atm a
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Formula 1-8 Mean free path www.pfei
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Formula 1-9 Knudsen number Formula
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Pa m 3 / s mbar l / s Torr l / s at
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Formula 1-17 Blocking Formula 1-18
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Formula 1-23 Molecular pipe conduct
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www.pfeiffer-vacuum.net Solid Liqui
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www.pfeiffer-vacuum.net 1.3.4 Bake-
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Formula 2-1 Compression ratio www.p
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Formula 2-7 Water vapor capacity ww
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www.pfeiffer-vacuum.net Filters Wit
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Model Penta 10 Penta 20 Penta 35 Mo
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www.pfeiffer-vacuum.net The ultimat
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www.pfeiffer-vacuum.net Inlet Appli
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Model MVP 006-4 MVP 015-2 MVP 015-4
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Model XtraDry 150-2 XtraDry 250-1 w
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www.pfeiffer-vacuum.net This result
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Model Hepta 100 Hepta 200 Hepta 300
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www.pfeiffer-vacuum.net 2.6.1 Desig
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Compression ratio K 0 10 2 30 10 1
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www.pfeiffer-vacuum.net Due to thei
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www.pfeiffer-vacuum.net 2.6.4.1 Sta
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www.pfeiffer-vacuum.net Soundproofi
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Model OnTool Booster 150 www.pfeif
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Formula 2-9 Turbopump K 0 Formula 2
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www.pfeiffer-vacuum.net 2.8.1.2 Hol
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www.pfeiffer-vacuum.net 2.8.1.3 Tur
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www.pfeiffer-vacuum.net Analytical
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Characteristic Pure turbo stages Tu
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www.pfeiffer-vacuum.net The magneti
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www.pfeiffer-vacuum.net With the ai
Page 73 and 74: www.pfeiffer-vacuum.net Figure 3.1:
Page 75 and 76: www.pfeiffer-vacuum.net A Pirani va
Page 77 and 78: www.pfeiffer-vacuum.net When instal
Page 79 and 80: www.pfeiffer-vacuum.net Pirani ther
Page 81 and 82: www.pfeiffer-vacuum.net Table 3.2:
Page 83 and 84: www.pfeiffer-vacuum.net DigiLine se
Page 85 and 86: www.pfeiffer-vacuum.net The followi
Page 87 and 88: www.pfeiffer-vacuum.net Inlet Syste
Page 89 and 90: Formula 4-2 Stability parameter a F
Page 91 and 92: Formula 4-7 Shot orifice Formula 4-
Page 93 and 94: www.pfeiffer-vacuum.net The higher
Page 95 and 96: Material Y 2O 3 / lr W Re Relative
Page 97 and 98: www.pfeiffer-vacuum.net A lattice i
Page 99 and 100: www.pfeiffer-vacuum.net Some of the
Page 101 and 102: www.pfeiffer-vacuum.net 4.1.2.3 Det
Page 103 and 104: Detectors www.pfeiffer-vacuum.net T
Page 105 and 106: Inlet System No pressure reduction
Page 107 and 108: www.pfeiffer-vacuum.net In the pres
Page 109 and 110: www.pfeiffer-vacuum.net The potenti
Page 111 and 112: www.pfeiffer-vacuum.net Mass discri
Page 113 and 114: 5 www.pfeiffer-vacuum.net Leak dete
Page 115 and 116: www.pfeiffer-vacuum.net Test gas V
Page 117 and 118: Formula 5-1 Leakage rate conversion
Page 119 and 120: Suitable With test chamber External
Page 121 and 122: www.pfeiffer-vacuum.net Bypass Opti
Page 123: Thickness � 1.00 1.20 1.50 1.60 1
Page 127 and 128: www.pfeiffer-vacuum.net 6.3 Detacha
Page 129 and 130: www.pfeiffer-vacuum.net Figure 6.7:
Page 131 and 132: www.pfeiffer-vacuum.net 6.5 Valves
Page 133 and 134: www.pfeiffer-vacuum.net In principl
Page 135 and 136: www.pfeiffer-vacuum.net Venting val
Page 137 and 138: www.pfeiffer-vacuum.net Figure 6.15
Page 139 and 140: Formula 7-2 K o of a Roots vacuum p
Page 141 and 142: p a / mbar 1,000.0000 800.0000 600.
Page 143 and 144: Formula 7-9 Calculation of the cond
Page 145 and 146: www.pfeiffer-vacuum.net The Roots p
Page 147 and 148: Formula 7-10 Diffusion coefficient
Page 149 and 150: www.pfeiffer-vacuum.net The turbopu
Page 151 and 152: www.pfeiffer-vacuum.net Since p 2 =
Page 153 and 154: www.pfeiffer-vacuum.net Vacuum Tech
Page 159 and 160: www.pfeiffer-vacuum.net Acknowledge
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