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Vacuum Technology Know How - Triumf

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Formula 1-9<br />

Knudsen number<br />

Formula 1-10<br />

Reynolds number<br />

www.pfeiffer-vacuum.net<br />

The dimensionless Knudsen number Kn is defined as the ratio between mean free path and<br />

component diameter<br />

In this case, Kn is < 0.01. In addition, the term viscous flow is used if the product of pressure p<br />

and diameter d of the components through which gas is flowing is p . d ≥ 6 . 10 -1 mbar . cm<br />

for air.<br />

In the case of viscous flow, a distinction is made between laminar and turbulent flow. Laminar<br />

flow prevails at low flow speeds. At higher flow speeds, this changes to a turbulent flow [2].<br />

The occurrence of turbulent flow is contingent upon the Reynolds number<br />

Where is:<br />

� = density [kg / m³]<br />

� = viscosity [Pas]<br />

v = flow velocity [m / s]<br />

d = tube diameter [m]<br />

Kn =<br />

l –<br />

d<br />

�<br />

Re = . v . d<br />

�<br />

Up to values of Re < 2,300 the flow will be laminar, and where Re > 4,000 the flow will be<br />

turbulent. In vacuum systems, the lines are dimensioned in such a manner that turbulent flow<br />

occurs only briefly at relatively high pressures, as the high flow resistance that occurs in this<br />

process necessitates that the pumps produce higher volume flow rates.<br />

Knudsen flow in medium vacuum, p = 100 – 10-3 mbar, mit l – ≤ d<br />

If the Knudsen number is between 0.01 and 0.5, this is termed Knudsen flow. Because<br />

many process pressures are in the medium vacuum range, this type of flow occurs with corresponding<br />

frequency. Since this is a transitional flow, this range is transited relatively quickly<br />

when pumping down vacuum chambers. This means that the influence of this conductivity<br />

on pump-down times is correspondingly low. It is a complicated endeavor to perform a<br />

precise calculation of conductivity where the flow range is still laminar and yet already molecular,<br />

and this will not be discussed here. A simple approximation for the Knudsen range can<br />

be obtained by adding the laminar and molecular conductivities. Figure 1.7 shows the<br />

conductivities of round, one meter long tubes of differing diameters in all three flow ranges.<br />

Molecular flow in high vacuum, (p = 10-3 – 10 -7 mbar), where l – > d and in ultra high<br />

vacuum (p < 10 -7 mbar), mit l – >> d<br />

At Knudsen numbers of Kn > 0.5 molecular interaction virtually no longer occurs. What<br />

prevails is molecular flow. In this case, the product of pressure p and component diameter d<br />

is p . d ≤ 1.3 . 10 - 2 mbar . cm.<br />

Page 15<br />

<strong>Vacuum</strong><br />

<strong>Technology</strong>

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