You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Formula 1-9<br />
Knudsen number<br />
Formula 1-10<br />
Reynolds number<br />
www.pfeiffer-vacuum.net<br />
The dimensionless Knudsen number Kn is defined as the ratio between mean free path and<br />
component diameter<br />
In this case, Kn is < 0.01. In addition, the term viscous flow is used if the product of pressure p<br />
and diameter d of the components through which gas is flowing is p . d ≥ 6 . 10 -1 mbar . cm<br />
for air.<br />
In the case of viscous flow, a distinction is made between laminar and turbulent flow. Laminar<br />
flow prevails at low flow speeds. At higher flow speeds, this changes to a turbulent flow [2].<br />
The occurrence of turbulent flow is contingent upon the Reynolds number<br />
Where is:<br />
� = density [kg / m³]<br />
� = viscosity [Pas]<br />
v = flow velocity [m / s]<br />
d = tube diameter [m]<br />
Kn =<br />
l –<br />
d<br />
�<br />
Re = . v . d<br />
�<br />
Up to values of Re < 2,300 the flow will be laminar, and where Re > 4,000 the flow will be<br />
turbulent. In vacuum systems, the lines are dimensioned in such a manner that turbulent flow<br />
occurs only briefly at relatively high pressures, as the high flow resistance that occurs in this<br />
process necessitates that the pumps produce higher volume flow rates.<br />
Knudsen flow in medium vacuum, p = 100 – 10-3 mbar, mit l – ≤ d<br />
If the Knudsen number is between 0.01 and 0.5, this is termed Knudsen flow. Because<br />
many process pressures are in the medium vacuum range, this type of flow occurs with corresponding<br />
frequency. Since this is a transitional flow, this range is transited relatively quickly<br />
when pumping down vacuum chambers. This means that the influence of this conductivity<br />
on pump-down times is correspondingly low. It is a complicated endeavor to perform a<br />
precise calculation of conductivity where the flow range is still laminar and yet already molecular,<br />
and this will not be discussed here. A simple approximation for the Knudsen range can<br />
be obtained by adding the laminar and molecular conductivities. Figure 1.7 shows the<br />
conductivities of round, one meter long tubes of differing diameters in all three flow ranges.<br />
Molecular flow in high vacuum, (p = 10-3 – 10 -7 mbar), where l – > d and in ultra high<br />
vacuum (p < 10 -7 mbar), mit l – >> d<br />
At Knudsen numbers of Kn > 0.5 molecular interaction virtually no longer occurs. What<br />
prevails is molecular flow. In this case, the product of pressure p and component diameter d<br />
is p . d ≤ 1.3 . 10 - 2 mbar . cm.<br />
Page 15<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>