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www.pfeiffer-vacuum.net<br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Page<br />
Table directory<br />
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Table 1.1 Total pressure and composition of air at 20 °C 10<br />
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and 50 % relative humidity<br />
Table 1.2 Pressure ranges / Molecular number density 11<br />
Table 1.3 Conversion table for units of pressure 11<br />
Table 1.4 Molar masses and mean thermal velocities of various gases 13<br />
Table 1.5 Mean free paths of various gases at 0 °C 14<br />
Table 1.6 Conversion table for units of flow, length and temperature 17<br />
Table 2.1 HenaLine performance data 32<br />
Table 2.2 UnoLine Plus performance data 32<br />
Table 2.3 PentaLine performance data 33<br />
Table 2.4 DuoLine performance data 33<br />
Table 2.5 Duo M series performance data 34<br />
Table 2.6 Duo C series and Duo MC series performance data 34<br />
Table 2.7 Oil types for backing pumps and Roots pumps 35<br />
Table 2.8 Diaphragm pump performance data 39<br />
Table 2.9 XtraDry piston pump performance data 41<br />
Table 2.10 HeptaDry series connections 45<br />
Table 2.11 HeptaDry performance data 45<br />
Table 2.12 OktaLine performance data 52<br />
Table 2.13 OnTool Booster performance data 57<br />
Table 2.14 Comparison between turbopumps and turbo drag pumps 67<br />
Table 2.15 HiPace ....................................................................<br />
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performance data 68<br />
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Table 2.16 Drives and power supplies 69<br />
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Table 3.1 Transmitters and vacuum gauges 80<br />
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Table 3.2 Pressure sensor selection table 81<br />
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Table 4.1 Filament materials and their employment 95<br />
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Table 4.2 Detectors and their attributes 103<br />
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Table 4.3 Various gas inlet systems and their attributes 105<br />
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Table 5.1 SmartTest leak detector selection table 119<br />
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Table 6.1 O-ring groove dimensioning table for axial, static seals 123<br />
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Table 6.2 Comparison of sealing materials 126<br />
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Table 7.1 Volume flow rate (pumping speed) of a Roots pumping station 141<br />
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Page 155<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>