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Formula 2-7<br />
Water vapor capacity<br />
www.pfeiffer-vacuum.net<br />
DIN 28426 describes the use of an indirect process to determine water vapor tolerance.<br />
Water vapor tolerance increases at higher pump outlet temperature and greater gas ballast<br />
volume q . It declines at higher ambient pressure.<br />
pB<br />
Without gas ballast, a vacuum pump having an outlet temperature of less than 100 °C would<br />
not be capable of displacing even small amounts of pure water vapor. If water vapor is nevertheless<br />
pumped without gas ballast, the condensate will dissolve in the pump oil. As a result,<br />
the base pressure will rise and the condensate could cause corrosion damage.<br />
Water vapor capacity<br />
c w0 = p w0 . S<br />
is the maximum volume of water that a vacuum pump can continuously intake and displace in<br />
the form of water vapor under the ambient conditions of 20 °C and 1,013 mbar.<br />
2.1.8 Sealing gas<br />
When pumping corrosive process gas, there is a risk that the gas might attack parts of the<br />
pump. To counter this danger, sensitive parts, e.g. bearings, must be protected by a continuous<br />
flow of inert gas. A special gas inlet system is installed in the pumps for this purpose,<br />
through which gas flows into the pumping system via the bearings. In this connection, it is<br />
necessary to ensure that the base pressure does not increase excessively.<br />
2.2 Rotary vane vacuum pump<br />
6<br />
5<br />
Figure 2.2: Operating principle of a rotary vane pump<br />
4<br />
3<br />
2<br />
1<br />
1) Housing<br />
2) Rotor<br />
3) Vane<br />
4) Inlet / Outlet<br />
5) Working chamber<br />
6) Outlet valve<br />
Page 29<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>