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<strong>Vacuum</strong><br />
www.pfeiffer-vacuum.net<br />
<strong>Technology</strong><br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Page<br />
1 Introduction to <strong>Vacuum</strong> <strong>Technology</strong> 8<br />
1.1 General 8<br />
1.1.1 What is vacuum? 8<br />
1.1.2 Overview of vacuum 8<br />
1.2 Fundamentals 9<br />
1.2.1 Pressure 9<br />
1.2.2 General gas equation 12<br />
1.2.3 Molecular number density 12<br />
1.2.4 Thermal molecular velocity 12<br />
1.2.5 Mean free path 13<br />
1.2.6 Types of flow 14<br />
1.2.7 p-V flow 16<br />
1.2.8 Conductivities 17<br />
1.3 Disturbing side effects 21<br />
1.3.1 Contamination 21<br />
1.3.2 Condensation and vaporization 21<br />
1.3.3 Desorption, diffusion, permeation and leaks 22<br />
1.3.4 Bake-out 25<br />
1.3.5 Residual gas spectrum 25<br />
1.3.6 Venting 25<br />
Page 3<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>
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