Vacuum Technology Know How - Triumf

Pfeiffer Vacuum
Page 68
Model
HiPace 10
HiPace 80 (DN 40)
HiPace 80 (DN 63)
HiPace 300
HiPace 400
HiPace 700
HiPace 1200
HiPace 1500
HiPace 1800
HiPace 2300
HiPace 2400 MC
HiPace 3400 MC
Vacuum Technology
Table 2.15 below contains the performance data for the standard pumps. All other series are
modifications of these standard models and essentially offer the same performance data.
Table 2.15: HiPace performance data
Pumping Speed
for N2 11.5 l / s
35.0 l / s
67.0 l / s
260.0 l / s
355.0 l / s
685.0 l / s
1,250.0 l / s
1,450.0 l / s
1,450.0 l / s
1,900.0 l / s
2,100.0 l / s
2,950.0 l / s
Compression Ratio
N 2
3.0 . 10 7
> 1.0 . 10 11
> 1.0 . 10 11
> 1.0 . 10 11
> 1.0 . 10 11
> 1.0 . 10 11
> 1.0 . 10 8
> 1.0 . 10 8
> 1.0 . 10 8
> 1.0 . 10 8
> 1.0 . 10 9
> 1.0 . 10 9
The base pressures of standard pumps with ISO-K flanges are: p b < 1 . 10 -7 mbar. Equipped
with CF flanges, these pumps can attain base pressures of p b < 5 . 10 -10 mbar after bake-out.
2.8.3.3 Controls, displays and drives
Applications
Analytical applications, leak detectors, gas
flow control systems, incandescent and
fluorescent lamp manufacturing
Analytical applications, research &
development, coating,
semiconductor manufacturing
Glass coating, solar cell manufacturing,
surface finishing, CVD, PVD / sputtering,
ion implantation, plasma physics, space
simulation
Coating industry, semiconductor
manufacturing, research & development
A variety of controls, displays and drives are available for operating turbopumps in different
applications; they are shown in the table 2.16.
The numbering used below is based upon Figure 2.26 (Accessories for turbopumps).
HiPace Models 10 to 300 (1a) are equipped with attached drive TC 400 (1b). They require a
supply voltage of 24 VDC. Integrated power supplies TPS 110 / 111 or 180 / 181 (2c) or power
supply modules DCU 110 or DCU 180 (2a) with DCU 002 display control unit are available for
off-line operation. HiPace Models 400 and 700 are equipped with the TC 400 drive.
The TC 400 can be operated either with 24 VDC or 48 VDC, depending upon the pump that
is connected. The supply voltage of 48 V can be provided by the TPS 400 integrated power
supply or the DCU 400 power supply module. The large HiPace 1200 to 2300 pumps are
powered by the attached TC 1200, which is supplied directly from the mains.
All HiPace 10 to 700 pumps can also be supplied without attached drive (e.g. for radioactive
environments). The TCP 350 drive with integrated power supply and with DCU 002 (2b) for
control is used for operation.
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