Vacuum Technology Know How - Triumf

Pfeiffer Vacuum
Page 154
Vacuum Technology
Vacuum Technology
Page
Figure directory
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Figure 4.19 Differentially pumped quadrupole mass spectrometer 106
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with various gas inlets
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Figure 4.20 Potential curve in an electrically biased ion source 108
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Figure 4.21 Design of the detectors in a QMA 400 HiQuad analyzer with 110
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Faraday cup and SEM
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Figure 5.1 Bubble leak test for a bicycle tube 114
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Figure 5.2 Schematic diagram of a helium counterflow leak detector 115
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Figure 5.3 Local leak detection by means of the sniffer and vacuum methods 117
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Figure 5.4 Integral leak detection by means of the sniffer 118
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and vacuum methods
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Figure 5.5 SmartTest HLT 560 leak detector 120
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Figure 5.6 SmartTest leak detector, HLT 572 with bypass and 121
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dry backing pump XtraDry
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Figure 6.1 O-ring in groove and corner positions 124
Figure 6.2 Centering rings 124
Figure 6.3 Trapezoid seal with spacer 125
Figure 6.4 Rotary feedthrough with radial shaft seal ring 126
Figure 6.5 Small flange connection 127
Figure 6.6 Clamping and fixed flange connections 128
Figure 6.7 Conflat ® flange connection 129
Figure 6.8 High vacuum angle valve 132
Figure 6.9 Electropneumatically actuated high vacuum inline valve 132
Figure 6.10 Rebound gate valve 133
Figure 6.11 Electromagnetically actuated bellows-sealed rebound gate valve 134
Figure 6.12 Pneumatically actuated plate valve 134
Figure 6.13 UHV dosing valve and electromagnetic angle valve 135
Figure 6.14 UHV cat’s-tail feedthrough 136
Figure 6.15 UHV multiple metal-to-ceramic electric feedthrough 137
Figure 7.1 Volume flow rate (pumping speed) of a pumping station with 141
Hepta 100 and Okta 500
Figure 7.2 Drying system (schematic) 142
Figure 7.3 Roots pumping station for vapor condensation 144
Figure 7.4 Throughput of TPH 2000 PC and Duo 120 C 148
Figure 7.5 Vacuum system with pressure and throughput regulation 149
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