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<strong>Vacuum</strong> <strong>Technology</strong><br />
Page<br />
5.2 Leak detection with helium 114<br />
5.2.1 Design of a helium leak detector 114<br />
5.2.2 Test methods 116<br />
5.2.3 Calibrating the leak detector 116<br />
5.2.4 Local leak detection 116<br />
5.2.5 Integral leak detection 117<br />
5.3 Application notes 118<br />
5.4 Portfolio 119<br />
6 Valves and Components 122<br />
6.1 General 122<br />
6.2 Seals 122<br />
6.3 Detachable joints 127<br />
6.4 Non-detachable connections 129<br />
6.5 Valves 131<br />
6.6 Feedthroughs 135<br />
7 Configuration 138<br />
7.1 General 138<br />
7.2 Calculations 138<br />
7.2.1 Dimensioning a Roots pumping station 138<br />
7.2.2 Condenser mode 142<br />
7.2.3 Turbopumping stations 145<br />
7.2.3.1 Evacuating a vessel to 10 - 8 mbar by means 145<br />
of a turbopumping station<br />
7.2.3.2 Pumping high gas loads by means of turbomolecular pumps 148<br />
7.3 Piping conductivities 150<br />
7.3.1 Laminar conductivity 150<br />
7.3.2 Molecular conductivity 151<br />
Figures 152<br />
Tables 155<br />
Formulas 156<br />
Literature 158<br />
Page 7<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>
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