Vacuum Technology Know How - Triumf

www.pfeiffer-vacuum.net
Vacuum Technology
Page
Figure directory
.........................................................................
Figure 2.23 Typical residual gas spectrum of a turbomolecular pump 63
....................................................................
Figure 2.24 Standard HiPace
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
....................................................................
turbopumps 66
Figure 2.25 HiPace MC magnetic-levitation turbopump 67
Figure 2.26 Accessories for turbopumps 70
Figure 3.1 Design of a diaphragm vacuum gauge 73
Figure 3.2 Design of a capacitative diaphragm vacuum gauge 73
Figure 3.3 Operating principle of a Pirani vacuum gauge 74
Figure 3.4 Pirani vacuum gauge curves 75
Figure 3.5 Design of an inverted magnetron 76
Figure 3.6 Operating principle of an inverted magnetron 77
Figure 3.7 Design of a Bayard-Alpert vacuum gauge 78
Figure 3.8 Pressure measurement ranges and measurement principles 79
Figure 3.9 DigiLine application concepts 82
Figure 3.10 ActiveLine application concepts 84
Figure 3.11 TPG 300 control unit for ModulLine vacuum gauges 85
Figure 4.1 Total and partial pressure measurement 86
Figure 4.2 Components of a mass spectrometer 87
Figure 4.3 Operating principle of a sector field mass spectrometer 88
Figure 4.4 Operating principle of a quadrupole mass spectrometer 89
Figure 4.5 Stability diagram of a quadrupole filter 90
Figure 4.6 Ion density as a function of electron energy 93
Figure 4.7 Fractal ion distribution of CO 95
2
Figure 4.8 Section through an axial ion source 96
Figure 4.9 Lattice ion source 96
Figure 4.10 Discrimination of EID ions 97
Figure 4.11 Crossbeam ion source 98
Figure 4.12 Gas-tight axial ion source 98
Figure 4.13 Sputter process monitor (SPM) ion source 99
Figure 4.14 PrismaPlus ion source 100
Figure 4.15 Operating principle of a Faraday Cup 101
Figure 4.16 Secondary electron multiplier (SEM) 102
Figure 4.17 Operating principle of a C-SEM 104
Figure 4.18 Quadrupole mass spectrometer with gas inlet system, 106
crossbeam ion source and cooling trap
Page 153
Vacuum
Technology