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Vacuum Technology Know How - Triumf

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Formula 7-2<br />

K o of a Roots<br />

vacuum pump<br />

Formula 7-3<br />

K 0 laminar<br />

Formula 7-4<br />

K 0 molecular<br />

Formula 7-5<br />

S 1 for �p d > L R >> S R and thus<br />

K 0l =<br />

and the following applies in the molecular flow range due to<br />

S 0<br />

L R<br />

At laminar flow (high pressure), the compression ratio is limited by backflow through the gap<br />

between piston and housing. Since conductivity is proportional to mean pressure, the compression<br />

ratio will decline as pressure rises.<br />

In the molecular flow range, the return gas flow SR . p from the discharge side predominates<br />

v<br />

and limits the compression ratio toward low pressure. Because of this effect, the use of Roots<br />

pumps is restricted to pressures p a of less than 10 - 4 mbar.<br />

Volume flow rate (pumping speed)<br />

Roots pumps are equipped with overflow valves that allow maximum pressure differentials<br />

�p of between 30 and 60 mbar at the pumps. If a Roots pump is combined with a backing<br />

d<br />

pump, a distinction must be made between pressure ranges with the overflow valve open<br />

(S 1 ) and closed (S 2 ).<br />

p S + L v 0 R<br />

= K0 =<br />

p LR + S a<br />

R<br />

S 0 >> S r >> L R : K 0m =<br />

Since gas throughput is the same in both pumps, the following applies:<br />

S l =<br />

S v . p v<br />

p - �pd<br />

v<br />

As long as �p d

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