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Pfeiffer <strong>Vacuum</strong><br />
Page 6<br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Page<br />
3.2 Application notes 78<br />
3.2.1 Measurement ranges 78<br />
3.2.2 Transmitters 79<br />
3.2.3 <strong>Vacuum</strong> gauges 79<br />
3.2.4 Combination sensors 80<br />
3.3 Portfolio overview 80<br />
3.3.1 Product lines 80<br />
3.3.1.1 DigiLine 80<br />
3.3.1.2 ActiveLine 83<br />
3.3.1.3 ModulLine 85<br />
4 Mass Spectrometers and Residual Gas Analysis 86<br />
4.1 Introduction, operating principle 86<br />
4.1.1 Sector field mass spectrometers 87<br />
4.1.2 Quadrupole mass spectrometers (QMS) 88<br />
4.1.2.1 Quadrupole mass filter 88<br />
4.1.2.2 Ion sources 93<br />
4.1.2.3 Detectors 101<br />
4.1.2.4 <strong>Vacuum</strong> system 104<br />
4.1.2.5 Inlet system 104<br />
4.1.3 Application notes 105<br />
4.1.4 Portfolio 107<br />
4.1.4.1 Advantages of Pfeiffer <strong>Vacuum</strong> mass spectrometers 108<br />
4.1.4.2 Data analysis systems 111<br />
5 Leak detection 113<br />
5.1 General 113<br />
5.1.1 Leaks and leak detection 113<br />
5.1.2 Leakage rate 113<br />
5.1.3 Test gases 114<br />
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