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Vacuum Technology Know How - Triumf

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Pfeiffer <strong>Vacuum</strong><br />

Formula 1-11<br />

pV flow<br />

Formula 1-12<br />

Definition of volume flow<br />

rate, or pumping speed<br />

Formula 1-13<br />

<strong>Vacuum</strong> pump throughput<br />

Page 16<br />

<strong>Vacuum</strong> <strong>Technology</strong><br />

Pipe diameter d<br />

100<br />

cm<br />

10<br />

1.2.7 pV flow<br />

Transitional Area<br />

1<br />

10 -5 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3<br />

Molecular<br />

Figure 1.6: Flow ranges in vacuum<br />

Dividing the general gas equation by time t yields the gas flow<br />

p . V m . R . T<br />

q pV = =<br />

t t . M<br />

This is also referred to as pV flow. As can be seen from the right-hand side of the equation, a<br />

constant mass flow is displaced at constant temperature T.<br />

<strong>Vacuum</strong> pumps, particularly positive displacement pumps, have a constant volume flow rate of<br />

S =<br />

over a given inlet pressure range; i.e. they displace a constant volume flow. Multiplying the<br />

volume flow rate by the inlet pressure yields the throughput of a pump<br />

Throughput is the gas flow transported by a vacuum pump.<br />

dV<br />

dt<br />

dV<br />

q pV = S . p = . p<br />

dt<br />

viscous<br />

Pressure p<br />

mbar<br />

www.pfeiffer-vacuum.net

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