Vacuum Technology Know How - Triumf

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Table 3.2: Pressure sensor selection table
Recommended
Possible
Transmitters / Measurement Gauges
DigiLine
Digital piezo transmitter
Digital Pirani transmitter
Digital piezo / Pirani transmitter
Digital Pirani / cold cathode transmitter
Digital Pirani / Bayard-Alpert transmitter
ActiveLine
Active piezo transmitter
Active capacitative transmitter
Temperature compensated
Temperature regulated
Active Pirani transmitter
Active Pirani / capacitative transmitter
Active cold cathode transmitter
Active Pirani / cold cathode transmitter
Active hot cathode transmitter
Active Pirani / Bayard-Alpert transmitter
ModulLine
Pirani pressure gauge
Cold cathode pressure gauge
Measurement Range Application
CPT 100
PPT 100
RPT 100
MPT 100
HPT 100
APR 250
APR 260
APR 262
APR 265
APR 266
APR 267
CMR 361
CMR 362
CMR 363
CMR 364
CMR 365
CMR 271
CMR 272
CMR 273
CMR 274
CMR 275
TPR 280
TPR 281
PCR 260
IKR 251
IKR 261
IKR 270
PKR 251
PKR 261
IMR 265
PBR 260
TPR 010
TPR 017
TPR 018
IKR 050
IKR 060
IKR 070
max. (mbar)
2,000
1,000
1,200
1,000
1,000
1,100
1,100
2,200
5,500
11,000
55,000
1,100
110
11
1.1
0.11
1,100
110
11
1.1
0.11
1,000
1,000
1,500
0.01
0.01
0.01
1,000
1,000
1,000
1,000
1,000
1,000
1,000
5 . - 3 10
5 . - 3 10
5 . - 3 10
min. (mbar)
1
1 . - 4 10
1 . - 4 10
5 . - 9 10
1 . - 9 10
1 . - 1 10
1 . - 1 10
2 . - 1 10
0.5
1
5
1 . - 1 10
1 . - 2 10
1 . - 3 10
1 . - 4 10
1 . - 5 10
1 . - 1 10
1 . - 2 10
1 . - 3 10
1 . - 4 10
1 . - 5 10
5 . - 4 10
5 . - 4 10
5 . - 4 10
2 . - 9 10
2 . - 9 10
5 . - 11 10
5 . - 9 10
5 . - 9 10
2 . - 6 10
5 . - 10 10
8 . - 4 10
8 . - 4 10
8 . - 4 10
2 . - 9 10
1 . - 10 10
1 . - 11 10
Vacuum
furnaces
Sputtering
Vaporization
chambers
Reactive
processes
Load locks
Accelerators
Page 81
Vacuum
Technology