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Pfeiffer <strong>Vacuum</strong><br />
Page 108<br />
<strong>Vacuum</strong> <strong>Technology</strong><br />
Modules<br />
Modules are special process monitoring or gas analysis devices that are equipped with various<br />
gas inlet systems and attached turbo drag pumps for evacuating the analyzer:<br />
The HPA 220 high-pressure analyzer, based upon the PrismaPlus<br />
Process pressure up to 5 mbar<br />
The SPM 220 sputter process monitor, based upon the PrismaPlus<br />
Process pressure up to 10 - 2 mbar or 10 mbar<br />
The SPM 700 sputter process monitor, based upon the HiQuad<br />
Process pressure same as SPM 220<br />
The EPD 700 is used to detect positive ions when etching in the gaseous phase and<br />
is based upon the HiQuad, Process pressure up to 10 - 2 mbar<br />
Benchtop mass spectrometers<br />
There are complete systems for process pressures of 1 bar; they are based<br />
upon the PrismaPlus:<br />
The OmniStar GSD 320 O with one gas inlet is used for quantitative gas analysis<br />
at atmospheric pressure with heated and temperature-regulated gas inlet systems<br />
The ThermoStar GSD 320 T is designed to be coupled with thermal scales<br />
These devices, or elements of them, are installed in complete devices by OEM customers.<br />
4.1.4.1 Advantages of Pfeiffer <strong>Vacuum</strong> mass spectrometers<br />
Electron Arrangement<br />
Potential Curve<br />
Electron Beam<br />
Neutral Particles<br />
100 V<br />
Anode<br />
Formation Area<br />
Cathode<br />
Wehnelt Electrode<br />
0 V<br />
-100 V<br />
V2<br />
Ions<br />
Figure 4.20: Potential curve in an electrically biased ion source<br />
V1<br />
Extraction<br />
V5<br />
Base Plate<br />
V3<br />
Focus<br />
Shot Orifice<br />
Rod System<br />
V4<br />
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