Vacuum Technology Know How - Triumf

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PI0249PE (March 2009/10) PI0249PE (March 2009/10) Pfeiffer <strong>Vacuum</strong> · Headquarters/Germany Phone +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net Pfeiffer <strong>Vacuum</strong> · Headquarters/Germany Phone +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net
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Vacuum Vacuum Technology Technology
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Vacuum www.pfeiffer-vacuum.net Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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Formula 1-3 Definition of pressure
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Pa bar mbar μbar Torr micron atm a
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Formula 1-8 Mean free path www.pfei
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Formula 1-9 Knudsen number Formula
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Pa m 3 / s mbar l / s Torr l / s at
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Formula 1-17 Blocking Formula 1-18
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Formula 1-23 Molecular pipe conduct
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www.pfeiffer-vacuum.net Solid Liqui
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www.pfeiffer-vacuum.net 1.3.4 Bake-
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Formula 2-1 Compression ratio www.p
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Formula 2-7 Water vapor capacity ww
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www.pfeiffer-vacuum.net Filters Wit
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Model Penta 10 Penta 20 Penta 35 Mo
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www.pfeiffer-vacuum.net The ultimat
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www.pfeiffer-vacuum.net Inlet Appli
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Model MVP 006-4 MVP 015-2 MVP 015-4
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Model XtraDry 150-2 XtraDry 250-1 w
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www.pfeiffer-vacuum.net This result
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Model Hepta 100 Hepta 200 Hepta 300
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www.pfeiffer-vacuum.net 2.6.1 Desig
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Compression ratio K 0 10 2 30 10 1
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www.pfeiffer-vacuum.net Due to thei
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www.pfeiffer-vacuum.net 2.6.4.1 Sta
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www.pfeiffer-vacuum.net Soundproofi
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Model OnTool Booster 150 www.pfeif
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Formula 2-9 Turbopump K 0 Formula 2
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www.pfeiffer-vacuum.net 2.8.1.2 Hol
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www.pfeiffer-vacuum.net 2.8.1.3 Tur
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www.pfeiffer-vacuum.net Analytical
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Characteristic Pure turbo stages Tu
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www.pfeiffer-vacuum.net The magneti
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www.pfeiffer-vacuum.net With the ai
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www.pfeiffer-vacuum.net Figure 3.1:
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www.pfeiffer-vacuum.net A Pirani va
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www.pfeiffer-vacuum.net When instal
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www.pfeiffer-vacuum.net Pirani ther
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www.pfeiffer-vacuum.net Table 3.2:
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www.pfeiffer-vacuum.net DigiLine se
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www.pfeiffer-vacuum.net The followi
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www.pfeiffer-vacuum.net Inlet Syste
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Formula 4-2 Stability parameter a F
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Formula 4-7 Shot orifice Formula 4-
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www.pfeiffer-vacuum.net The higher
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Material Y 2O 3 / lr W Re Relative
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www.pfeiffer-vacuum.net A lattice i
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www.pfeiffer-vacuum.net Some of the
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www.pfeiffer-vacuum.net 4.1.2.3 Det
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Detectors www.pfeiffer-vacuum.net T
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Inlet System No pressure reduction
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www.pfeiffer-vacuum.net In the pres
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Page 111 and 112: www.pfeiffer-vacuum.net Mass discri
Page 113 and 114: 5 www.pfeiffer-vacuum.net Leak dete
Page 115 and 116: www.pfeiffer-vacuum.net Test gas V
Page 117 and 118: Formula 5-1 Leakage rate conversion
Page 119 and 120: Suitable With test chamber External
Page 121 and 122: www.pfeiffer-vacuum.net Bypass Opti
Page 123 and 124: Thickness � 1.00 1.20 1.50 1.60 1
Page 125 and 126: www.pfeiffer-vacuum.net Trapezoid s
Page 127 and 128: www.pfeiffer-vacuum.net 6.3 Detacha
Page 129 and 130: www.pfeiffer-vacuum.net Figure 6.7:
Page 131 and 132: www.pfeiffer-vacuum.net 6.5 Valves
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Page 137 and 138: www.pfeiffer-vacuum.net Figure 6.15
Page 139 and 140: Formula 7-2 K o of a Roots vacuum p
Page 141 and 142: p a / mbar 1,000.0000 800.0000 600.
Page 143 and 144: Formula 7-9 Calculation of the cond
Page 145 and 146: www.pfeiffer-vacuum.net The Roots p
Page 147 and 148: Formula 7-10 Diffusion coefficient
Page 149 and 150: www.pfeiffer-vacuum.net The turbopu
Page 151 and 152: www.pfeiffer-vacuum.net Since p 2 =
Page 153 and 154: www.pfeiffer-vacuum.net Vacuum Tech
Page 159: www.pfeiffer-vacuum.net Acknowledge
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